Enhanced robustness of a bridge-type Rf-mems switch for enabling applications in 5G and 6G communications
J Casals-Terré, L Pradell, JC Heredia, F Giacomozzi… - Sensors, 2022 - mdpi.com
In this paper, new suspended-membrane double-ohmic-contact RF-MEMS switch
configurations are proposed. Double-diagonal (DDG) beam suspensions, with either two or …
configurations are proposed. Double-diagonal (DDG) beam suspensions, with either two or …
Design of a wide bandwidth terahertz MEMS Ohmic switch for 6G communication applications
With the new arena of smart and Internet of things (IoT) enabled devices, a terahertz
frequency-based network like 6G with high speed and low latency is required. Solid-state …
frequency-based network like 6G with high speed and low latency is required. Solid-state …
On the electrostatic actuation of capacitive RF MEMS switches on GaAs substrate
The electrostatic actuation behaviour of the gold bridge in capacitive radio frequency
microelectromechanical system switches, fabricated on GaAs substrate, is investigated. An …
microelectromechanical system switches, fabricated on GaAs substrate, is investigated. An …
Modeling and experimental verification of thermally induced residual stress in RF-MEMS
A Somà, MM Saleem - Journal of Micromechanics and …, 2015 - iopscience.iop.org
Electrostatically actuated radio frequency microelectromechanical systems (RF-MEMS)
generally consist of microcantilevers and clamped–clamped microbeams. The presence of …
generally consist of microcantilevers and clamped–clamped microbeams. The presence of …
A Reconfigurable Pseudohairpin Filter Based on MEMS Switches
M Donelli, M Manekiya, G Tagliapietra, J Iannacci - Sensors, 2022 - mdpi.com
This work presents a bandpass-reconfigurable planar pseudohairpin filter based on RF-
MEMS switches. Hairpin-line structures are preferred to design microstrip filters because this …
MEMS switches. Hairpin-line structures are preferred to design microstrip filters because this …
A technique for estimation of residual stress and young's modulus of compressively stressed thin films using microfabricated beams
Predictive design of MEMS devices and their performance evaluation require post-
fabrication measurement of essential material properties, such as Young's modulus and …
fabrication measurement of essential material properties, such as Young's modulus and …
Out-of-plane deformation and pull-in voltage of cantilevers with residual stress gradient: Experiment and modelling
The out-of-plane deformation and the pull-in voltage of electrostatically actuated cantilevers
with a residual stress gradient, is investigated in the length range 100–300 µm. Measured …
with a residual stress gradient, is investigated in the length range 100–300 µm. Measured …
Temperature as an accelerating factor for lifetime estimation of RF-MEMS switches
In satellite applications the devices have to retain their functionality for years and this
requirement necessitate of reliable methodologies to predict the switch lifetime. At present, a …
requirement necessitate of reliable methodologies to predict the switch lifetime. At present, a …
Evaluation of nanoindentation load-depth curve of MEMS bridge structures by calculating the critical elastic-plastic bending deflections
Z Ma, H Zhao, X Du, M Zhou, X Ma, C Liu, L Ren - Applied Surface Science, 2018 - Elsevier
This paper proposes a correction method to accurately evaluate the nanoindentation load-
depth (Ph) curve of MEMS double clamped micro bridge structures. Critical elastic and …
depth (Ph) curve of MEMS double clamped micro bridge structures. Critical elastic and …
Long-term lifetime prediction for RF-MEMS switches
Time to failure estimations of RF-MEMS (radio-frequency microelectromechanical system)
switches under prolonged actuation is particularly interesting for satellite applications, where …
switches under prolonged actuation is particularly interesting for satellite applications, where …