摘要对于步进扫描投影光刻机, 掩模台和工件台的同步伺服性能将直接影响整机技术指标.
掩模台和工件台是典型的六自由度超精密运动台, 在耦合动力学, 复杂内外部干扰条件下兼顾高 …

In this article, to guarantee the good tracking performance of the precision motion system for
various tracking tasks, an online iterative learning compensation method is proposed for …

In this paper, for periodic motion tasks, combining adaptive PID-type sliding mode control
(APIDSMC), model reference adaptive control (MRAC) and periodic adaptive learning …

Iterative learning control (ILC) enables high performance for motion systems executing
repetitive tasks. The robustness filter of ILC enhances the robustness wrt model …

The feedforward control can effectively improve the servo performance in applications with
high requirements of velocity and acceleration. The iterative feedforward tuning method …

Considering the increasingly strict motion precision requirements and repetitive task
characteristics of magnetic levitation systems (MLSs) in the sophisticated industry, this article …

To meet the progressively stringent demands for trajectory tracking performance in
precision/ultra-precision industry, multiple advanced feedforward compensation strategies …

Lithographic machine tools require both high motion accuracy and high motion flexibility.
Projection based iterative learning control (P-ILC) is appealing for wafer stages to achieve …

This paper proposes a novel performance‐enhanced iterative learning control (ILC) scheme
using a model‐free disturbance observer (DOB) to achieve high performance for precision …

This paper focuses on the force ripple estimation and compensation with the Kalman filter for
the permanent magnet linear synchronous machine (PMLSM). The force ripple dynamics is …