A learning-based stable servo control strategy using broad learning system applied for microrobotic control

S Xu, J Liu, C Yang, X Wu, T Xu - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
As the controller parameter adjustment process is simplified significantly by using learning
algorithms, the studies about learning-based control attract a lot of interest in recent years …

Learning control for motion coordination in wafer scanners: toward gain adaptation

F Song, Y Liu, D Shen, L Li, J Tan - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
Accurate pattern transfer in wafer scanners necessitates the wafer stage and the reticle
stage executing a coordinated motion with the synchronization error in terms of nanometers …

Iterative learning based neural network sliding mode control for repetitive tasks: With application to a PMLSM with uncertainties and external disturbances

W Liu, F Shu, Y Xu, R Ding, X Yang, Z Li… - Mechanical Systems and …, 2022 - Elsevier
The uncertainties, force ripple, friction and other external disturbances in permanent magnet
linear synchronous motors (PMLSMs) pose great challenges to the design of advanced …

Fuzzy-based controller synthesis and optimization for underactuated mechanical systems with nonholonomic servo constraints

X Chen, J Ma, H Sun, S Zhen, H Zhao… - … on Fuzzy Systems, 2022 - ieeexplore.ieee.org
This article investigates the trajectory tracking problem of underactuated mechanical
systems (UMSs) with companion nonholonomic servo constraints and uncertainties. For …

Control of distributed converter-based resources in a zero-inertia microgrid using robust deep learning neural network

I Ngamroo, T Surinkaew - IEEE Transactions on Smart Grid, 2023 - ieeexplore.ieee.org
Considering the evolution of future microgrids (MGs) towards zero-inertia level due to the
penetrations of distributed converter-based resources (DCRs), a large number of data …

Hybrid active–passive robust control framework of a flexure-joint dual-drive gantry robot for high-precision contouring tasks

W Wang, J Ma, X Li, H Zhu… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
For high-precision contouring tasks in a typical Cartesian motion system, multiaxis
cooperation is a long-standing challenging issue. Inevitably, various factors pose substantial …

Planar Two-Dimensional Capacitive Displacement Sensor Based on Time Grating

K Peng, Z Deng, X Liu, H Wang… - IEEE Transactions on …, 2023 - ieeexplore.ieee.org
Efforts to meet the demand for planar 2-D displacement measurement systems are limited by
the difficulties of manufacturing 2-D diffraction gratings with high precision over a large area …

Image-Guided Trajectory Tracking Control of the Nanopositioning Stages Using Regional Dense Photometic Information

H Li, N Xu, X Zhang, B Zhu - IEEE Transactions on Industrial …, 2023 - ieeexplore.ieee.org
For compliant nanopositioning stages, the closed-loop control can effectively reduce the
trajectory tracking error caused by modeling uncertainties and unknown disturbances …

Learning-Based High-Precision Tracking Control: Development, Synthesis, and Verification on Spiral Scanning With a Flexure-Based Nanopositioner

X Li, H Zhu, J Ma, W Wang, TJ Teo… - IEEE/ASME …, 2024 - ieeexplore.ieee.org
The traditional methodology utilized in dynamic tracking control synthesis is usually model-
based, and therefore, the performance is highly dependent on a precise mathematical …

Fuzzy-Based Adaptive Reliable Motion Control of a Piezoelectric Nanopositioning System

L Chen, Q Xu - IEEE Transactions on Fuzzy Systems, 2024 - ieeexplore.ieee.org
The nonlinearity and cross-axis coupling of piezo-driven multiple-degree-of-freedom (multi-
DOF) nanopositioning systems impose challenges to achieving precise and reliable motion …