Surface Roughness Influence on O2 and Ar RIE Gas Treated Aluminum Surface
Z Sauli, V Retnasamy, U Hashim… - Advanced Materials …, 2014 - Trans Tech Publ
This study reports on the preliminary investigations on the effect of Reactive Ion Etch (RIE)
parameters on the surface characteristics of Al bond pad. Investigation is done employing …
parameters on the surface characteristics of Al bond pad. Investigation is done employing …
Investigation of Surface Roughness on Platinum Deposited Wafer after Reactive Ion Etching Using SF6+Argon Gaseous
Z Sauli, V Retnasamy, AKT Yeow, GS Chui… - Applied Mechanics …, 2014 - Trans Tech Publ
This paper investigates the factors that affect the surface roughness on a Platinum deposited
wafer after reactive ion etching (RIE) using a combination of SF6 and Argon gaseous. A total …
wafer after reactive ion etching (RIE) using a combination of SF6 and Argon gaseous. A total …