Atmospheric micro-sized cold plasma jet created by a long and ultra-flexible generator with sputtered gold thin film electrode
Atmospheric cold plasma jets with various configurations have drawn intense interests in
diverse applications, such as surface modification and endoscopic applications. In this …
diverse applications, such as surface modification and endoscopic applications. In this …
Sub-micrometer plasma-enhanced chemical vapor deposition using an atmospheric pressure plasma jet localized by a nanopipette scanning probe microscope
S Yamamoto, K Nakazawa, A Ogino… - … of Micromechanics and …, 2021 - iopscience.iop.org
We developed a localized plasma-enhanced chemical vapor deposition (PE-CVD)
technique to deposit silicon oxide with a sub-micrometer width on a substrate using an …
technique to deposit silicon oxide with a sub-micrometer width on a substrate using an …
Investigation on Localized Etching Behaviors of Polymer Film by Atmospheric Pressure Plasma Jets
This paper investigates the effect of physical bombardment, chemical reaction etching and
ultraviolet (UV) radiation on polymer film etching by atmospheric pressure He, O2 and …
ultraviolet (UV) radiation on polymer film etching by atmospheric pressure He, O2 and …
Investigation on Different Etching Behaviors of Polymer Surface by Plasma Jets at Atmospheric Condition
T Wang, J Wang, X Wang, S Wang, W Yang… - Available at SSRN … - papers.ssrn.com
This paper investigates the effect of physical bombardment, chemical reaction etching and
ultraviolet (UV) radiation on polymer film etching by atmospheric pressure pure He, O 2 and …
ultraviolet (UV) radiation on polymer film etching by atmospheric pressure pure He, O 2 and …
大気圧プラズマジェット照射可能なナノピペットプローブ顕微鏡の開発
岩田太 - 日本表面真空学会学術講演会要旨集2021 年日本表面 …, 2021 - jstage.jst.go.jp
抄録 大気圧プラズマジェットは表面改質や殺菌処理, 治療など多義にわたる応用が期待され, 近年,
盛んに研究されている. プラズマ照射範囲を局在化することで微細加工が可能であることから …
盛んに研究されている. プラズマ照射範囲を局在化することで微細加工が可能であることから …