Electrostatic pull-in instability in MEMS/NEMS: A review

WM Zhang, H Yan, ZK Peng, G Meng - Sensors and Actuators A: Physical, 2014 - Elsevier
Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …

[HTML][HTML] The effect of small scale on the pull-in instability of nano-switches using DQM

T Mousavi, S Bornassi, H Haddadpour - International Journal of Solids and …, 2013 - Elsevier
This paper deals with the study of the small scale effect on the pull-in instability of nano-
switches subjected to electrostatic and intermolecular forces. Using Eringen's nonlocal …

Some singular equations modeling MEMS

P Laurençot, C Walker - Bulletin of the American Mathematical Society, 2017 - ams.org
In the past fifteen years mathematical models for microelectromechanical systems (MEMS)
have been the subject of several studies, in particular due to the interesting qualitative …

[HTML][HTML] Tri-electrode MEMS electrostatic actuator with lower control voltage and higher stroke for actuator array implementations

M Allameh, C Shafai - journal of Electrostatics, 2021 - Elsevier
Employing a tri-electrode actuator in place of a conventional parallel plate electrostatic
actuator, can enable significantly lower control voltage operation for applications such as …

Numerical approaches for recovering the deformable membrane profile of electrostatic microdevices for biomedical applications

M Versaci, FC Morabito - Sensors, 2023 - mdpi.com
Recently, a circular symmetrical nonlinear stationary 2D differential model for biomedical
micropumps, where the amplitude of the electrostatic field is locally proportional to the …

Non-linear effects on canonical MEMS models

ND Brubaker, JA Pelesko - European Journal of Applied …, 2011 - cambridge.org
In modelling electrostatically actuated micro-and nano-electromechanical systems,
researchers have typically relied on a small-aspect ratio to form a leading-order theory. In …

Analysis of static charge induced pull-in of an electrostatic MEMS

M Kumar, B Mukherjee, S Sen - Communications in Nonlinear Science and …, 2021 - Elsevier
Electrostatic actuation of micro-structures is largely affected by static charges, leading to its
unpredictable behavior. Microstructures mainly accumulate static charges during fabrication …

Finite differences for recovering the plate profile in electrostatic MEMS with fringing field

M Versaci, L Fattorusso, A Jannelli, P Di Barba - Electronics, 2022 - mdpi.com
Global existence and uniqueness conditions for a dimensionless fourth-order integro-
differential model for an electrostatic-elastic MEMS device with parallel plates and fringing …

Galerkin-FEM approach for dynamic recovering of the plate profile in electrostatic MEMS with fringing field

M Versaci, G Angiulli, LA Fattorusso… - … journal for computation …, 2024 - emerald.com
Purpose Based on previous results of the existence, uniqueness, and regularity conditions
for a continuous dynamic model for a parallel-plate electrostatic micro-electron-mechanical …

Differences between plate theory and lumped element model in electrostatic analysis of one-sided and two-sided CMUTs with circular microplates

M Saadatmand, J Kook - Journal of the Brazilian Society of Mechanical …, 2020 - Springer
An analytical study of capacitive micromachined ultrasonic transducers (CMUTs) with
circular microplates has been carried out. The study comprises one-sided (single electrode …