Towards monolithic integration of germanium light sources on silicon chips

S Saito, AZ Al-Attili, K Oda… - … Science and Technology, 2016 - iopscience.iop.org
Germanium (Ge) is a group-IV indirect band gap semiconductor, and therefore bulk Ge
cannot emit light efficiently. However, the direct band gap energy is close to the indirect one …

High-quality Ge epilayers grown on a Si substrate in one step process via hot wire chemical vapor deposition

SA Denisov, SA Matveev, VY Chalkov… - Journal of Physics …, 2016 - iopscience.iop.org
High-quality Ge epilayers on Si with a low threading-dislocation density (TDD) were grown
by a one step hot wire chemical vapor deposition process at 350 C without cyclic thermal …

Low temperature growth of the epitaxial Ge layers on Si (100) by Hot Wire Chemical Vapor Deposition

SA Matveev, SA Denisov, DV Guseinov… - Journal of Physics …, 2014 - iopscience.iop.org
In the present paper, we report on the growing of thick (~ 0.2-3.0 μm) epitaxial Ge/Si (100)
layers by Hot Wire Chemical Vapor Deposition (HWCVD) at low growth temperatures (350 …

Gallium-doped germanium epitaxial layers grown on silicon substrates by hot wire chemical vapor deposition

VG Shengurov, SA Denisov, VY Chalkov… - Materials Science and …, 2020 - Elsevier
We report on growing the p-Ge: Ga/Si (0 0 1) epitaxial layers by hot wire chemical vapor
deposition using a solid Ge: Ga sublimation source of Ga. The Ge: Ga layers grown using …

Photodetectors on the basis of Ge/Si (001) heterostructures grown by the hot-wire CVD technique

VG Shengurov, VY Chalkov, SA Denisov, NA Alyabina… - Semiconductors, 2015 - Springer
The fabrication of photodetectors for the wavelength range of communications λ= 1.3–1.55
µm on the basis of Ge/Si (001) heterostructures with thick (~ 0.5 µm) Ge layers grown by the …

Hot-wire chemical vapor deposition for epitaxial silicon growth on large-grained polycrystalline silicon templates

MS Mason, CM Chen, HA Atwater - Thin Solid Films, 2003 - Elsevier
We investigate low-temperature epitaxial growth of thin silicon films by HWCVD on Si [100]
substrates and polycrystalline template layers formed by selective nucleation and solid …

Epitaxial n+-Ge/p+-Si (0 0 1) heterostructures with ultra sharp doping profiles for light emitting diode applications

AM Titova, VG Shengurov, DO Filatov… - Materials Science and …, 2023 - Elsevier
The prototype light emitting diodes (LEDs) were fabricated from the n+-Ge/p+-Si (0 0 1)
heterostructures grown by low-temperature Hot Wire Chemical Vapor Deposition. The n+-Ge …

Growth defects in GeSn/Ge/Si (001) epitaxial layers grown by hot wire chemical vapor deposition of Ge with co-evaporation of Sn

VG Shengurov, VY Chalkov, SA Denisov… - Journal of Crystal …, 2022 - Elsevier
We report on the investigation of the growth defect formation in the GeSn/Ge/Si (001)
epitaxial layers grown by hot wire chemical vapor deposition of Ge with simultaneous co …

[PDF][PDF] Фотодетекторы на базе гетероструктур Ge/Si (001), выращенных методом горячей проволоки

ВГ Шенгуров, ВЮ Чалков, СА Денисов… - Физика и техника …, 2015 - journals.ioffe.ru
Сообщается о создании фотодетекторов коммуникационного диапазона длин волн λ=
1. 3− 1. 55 мкм на базе гетероструктур Ge/Si (001) с толстыми (~ 0. 5 мкм) слоями Ge …

Spectro-ellipsometric probing of wetting, nucleation, and dot/island formation during photo-excited chemical vapor deposition of Ge on SiO2 substrate

H Akazawa - Journal of Vacuum Science & Technology B, 2022 - pubs.aip.org
The morphological evolution of Ge layers growing on the SiO 2/Si (100) substrate by photo-
excited chemical vapor deposition was traced through an analysis of pseudodielectric …