CR Pan, MC Zhou, Y Qiao… - IEEE transactions on …, 2017 - ieeexplore.ieee.org
Cluster tools are automated robotic manufacturing systems containing multiple computer- controlled process modules. They have been increasingly used for wafer fabrication. This …
This book is an outgrowth of an earlier text that appeared in 1999 under the title “Operations Scheduling with Applications in Manufacturing and Services”, coauthored with Xiuli Chao …
Scheduling problems have been investigated since the late fifties. Two types of applications have mainly motivated research in this area: project planning and machine scheduling …
JH Lee, HJ Kim - International journal of production research, 2022 - Taylor & Francis
We address a robotic flow shop scheduling problem where two part types are processed on each given set of dedicated machines. A single robot moving on a fixed rail transports one …
Q Zhang, H Manier, MA Manier - Computers & Operations Research, 2012 - Elsevier
In this paper, we propose a model for Flexible Job Shop Scheduling Problem (FJSSP) with transportation constraints and bounded processing times. This is a NP hard problem …
In this survey we review the current complexity status of basic cyclic scheduling models. We start with the formulations of three fundamental cyclic scheduling problems, namely the …
In semiconductor manufacturing, there are wafer fabrication processes with wafer revisiting. Some of them must meet wafer residency time constraints. Taking atomic layer deposition …
For some wafer fabrication processes in cluster tools, eg, atomic layer deposition (ALD), wafer revisiting is required. Typically, in such processes, wafers need to visit two …
J Hurink, S Knust - European journal of operational research, 2005 - Elsevier
We consider a generalized job-shop problem where the jobs additionally have to be transported between the machines by a single transport robot. Besides transportation times …