F Gutierrez, M Tomaszewicz… - US Patent …, 2024 - Google Patents
A system, method, and computer-readable medium for generating factual and/or counterfactual data are described. This may have the effect of improving the complexity of …
A Srikantha, C Wojek, K Lee, T Korb… - US Patent …, 2022 - Google Patents
Methods for determining metrology sites for products includes detecting corresponding objects in measurement data of one or more product samples, and aligning the detected …
M Shifrin, A Ger - US Patent 12,057,355, 2024 - Google Patents
Controlling semiconductor device manufacture by acquiring training scatterometric signatures collected at training locations on training semiconductor wafers and …