Si-based MEMS resonant sensor: A review from microfabrication perspective
With the technological advancement in micro-electro-mechanical systems (MEMS),
microfabrication processes along with digital electronics together have opened novel …
microfabrication processes along with digital electronics together have opened novel …
Applications of uv-liga and grayscale lithography for display technologies
IV Timoshkov, AV Khanko, VI Kurmashev… - Доклады …, 2019 - cyberleninka.ru
In the article MEMS technologies for display production and application presented. UV-LIGA
and greyscale lithography based on SU-8 resist approaches were shown. Methods …
and greyscale lithography based on SU-8 resist approaches were shown. Methods …
MEMS fabrication and frequency sweep for suspending beam and plate electrode in electrostatic capacitor
We report a MEMS fabrication and frequency sweep for a high-order mode suspending
beam and plate layer in electrostatic micro-gap semiconductor capacitor. This suspended …
beam and plate layer in electrostatic micro-gap semiconductor capacitor. This suspended …
[PDF][PDF] Modeling and calculating the anchor loss quality factor in the plunging-mode vibrations of a micromechanical rectangular-plate resonator with two T-shaped …
Micromechanical resonators are miniature devices that vibrate at high frequencies.
Nowadays, with the recent advances in micro-electro-mechanical systems (MEMS) …
Nowadays, with the recent advances in micro-electro-mechanical systems (MEMS) …
Bulk silicon micromachined suspended fixed-end SiO2 film capacitor for passive high-pass RC filter
We reported a suspended fixed-end 5 μm thin SiO 2 film beam and plate MEMS capacitor for
passive high-pass RC filter. This suspended structure was fabricated using bulk silicon two …
passive high-pass RC filter. This suspended structure was fabricated using bulk silicon two …
مدل سازی و محاسبه‌ی ضریب کیفیت اتلاف تکیه‌گاه در مد ارتعاشی شناور تشدیدگر مستطیلی میکرومکانیکی با دو تیر نگهدارنده T شکل
باقری, بیجاری, راغبی - مهندسی مکانیک مدرس, 2015 - mme.modares.ac.ir
Micromechanical resonators are miniature devices that vibrate at high frequencies.
Nowadays, with the recent advances in micro-electro-mechanical systems (MEMS) …
Nowadays, with the recent advances in micro-electro-mechanical systems (MEMS) …
[引用][C] طرح جدید تشدیدگر مستطیلی میکرومکانیکی در مد ارتعاشی شناور با ضریب کیفیت بالا و مدهای ناخواسته پایین
بیجاری, راغبی, باقری - فصلنامه صنایع الکترونیک, 2015