A review on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications

Kurmendra, R Kumar - Microsystem Technologies, 2021 - Springer
This paper is designed to review the MEMS switch by considering key aspects on the basis
of mechanical structure, actuation methods, and types of contact and circuit configurations …

Revolutionizing wireless communication: A review perspective on design and optimization of RF MEMS switches

JJ Percy, S Kanthamani - Microelectronics Journal, 2023 - Elsevier
Abstract Micro Electro Mechanical System (MEMS) technology revolutionized electronics by
enabling miniaturization and integration of components like sensors, actuators, & switches …

Modeling and design enhancement of electrothermal actuators for microgripping applications

PD Pour, M Ghommem, A Abdelkefi - Applied Sciences, 2023 - mdpi.com
Microgrippers are miniature tools that have the capability to handle and manipulate micro-
and nano-scale objects. The present work demonstrates the potential impact of the …

Comprehensive review of low pull-in voltage RF NEMS switches

R Chaudhary, PR Mudimela - Microsystem Technologies, 2023 - Springer
The present study focuses on state-of-the-art of the demand, operating principles, design
parameters, different materials for beam and dielectric, already existing technologies and …

Study of pull-in voltage of a perforated SMA based MEMS Switch

SA Huddar, BG Sheeparamatti… - … Devices, Circuits and …, 2017 - ieeexplore.ieee.org
This paper involves the study of pull-in voltage of a Shape Memory Alloy (SMA) based
cantilever beam. The study is carried out by applying electrostatic forces and varying the …

Three-dimensional finite element method simulation of perforated graphene nano-electro-mechanical (NEM) switches

MA Zulkefli, MA Mohamed, KS Siow, B Yeop Majlis… - Micromachines, 2017 - mdpi.com
The miniaturization trend leads to the development of a graphene based
nanoelectromechanical (NEM) switch to fulfill the high demand in low power device …

Investigations on beam membrane and dielectric materials using Ashby's methodology and their impact on the performance of a MEMS capacitive switch

Kurmendra, R Kumar - Microsystem Technologies, 2021 - Springer
The micro-electro-mechanical-system switch performance significantly depends on
materials used for the design of different components. The two most important elements of …

Finite element analysis of graphene oxide hinge structure-based RF NEM switch

R Chaudhary, P Jhanwar… - IETE Journal of Research, 2023 - Taylor & Francis
The modelling and simulation of nanoelectromechanical (NEM) switch is indispensable to
get optimum device dimensions. The present work deals with the design and simulation of …

Stress analysis of perforated graphene nano-electro-mechanical (NEM) contact switches by 3D finite element simulation

MA Zulkefli, MA Mohamed, KS Siow, BY Majlis… - Microsystem …, 2018 - Springer
In this article, we report the finite element method (FEM) simulation of the suspended double-
clamped graphene beam-based NEM switches with standard and perforated beam …

Up-state and Down-state Capacitance Measurement in RF MEMS One-bit Switch Designed at Microwave Frequency Range

P Debnath, A Deyasi, A Sarkar - 2019 Devices for Integrated …, 2019 - ieeexplore.ieee.org
Insertion loss, isolation factor and return loss of one-bit RF MEMS switch designed at higher
microwave frequency ranges is numerically measured for computation of up-state and down …