Precision positioning systems with large working stroke (millimeter or more) and micro/nano-
scale positioning resolution are widely required in both scientific research and industries …

This paper presents the mechanical design and dynamics of a 3-DOF (degree of freedom)
flexure-based parallel mechanism. Flexure hinges are used as the revolute joints to provide …

This paper presents the design methodology and dynamic modelling of a piezo-driven
flexure-based Scott–Russell mechanism for nano-manipulations. Based on finite element …

We produced kilometer-long, endlessly parallel, spontaneously piezoelectric and thermally
stable poly (vinylidene fluoride)(PVDF) micro-and nanoribbons using iterative size reduction …

This paper proposes a novel piezo-driven compliant stage for long travel range with nano-
motion. For long travel range, the piezo-driven compliant stage requires mechanical …

Dual-servo systems (DSSs) are highly desirable in micro-/nanomanipulation when high
positioning accuracy, long stroke motion, and high servo bandwidth are required …

Actuators with high linear-motion speed, high positioning resolution and a long motion
stroke are needed in many precision machining systems. In some current systems, voice coil …

Traditionally, the coarse and fine mechanical stages within a dual-stage positioning system
are designed separately without consideration about their control performance in dual-stage …

A macro-micro composite precision positioning stage is mainly used in microelectronics
manufacturing to achieve high-velocity and high-precision positioning. The residual …

This paper presents a novel parallel actuation dual-stage system that delivers nanometric
positioning over a large displacement. Unlike those traditional dual-stage designs, the …