Z Kong, Z Li, G Cao, J Su, Y Zhang, J Liu… - … Applied Materials & …, 2023 - ACS Publications
We develop a method to fabricate an undoped Ge quantum well (QW) under a 32 nm
relaxed Si0. 2Ge0. 8 shallow barrier. The bottom barrier contains Si0. 2Ge0. 8 (650° C) and …