Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …

Solid–solid adhesion occurs at contacting asperities in two contacting solids. A thin liquid
film with a small contact angle, present at the interface, can result in the so-called liquid …

Interfacial adhesion and friction are important factors in determining the performance and
reliability of microelectro-mechanical systems. We demonstrate that the adhesion of …

A review is presented of the mechanics of microscale adhesion in microelectromechanical
systems (MEMS). Some governing dimensionless numbers such as Tabor number …

Over the last few years, considerable effort has gone into the study of the failure
mechanisms and reliability of micro-electromechanical systems (MEMS). Although still very …

Microelectromechanical systems (MEMS) represents a technology that integrates
miniaturized mechanical and electromechanical components (ie, sensors and actuators) that …

Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi,
Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to …

Successful deposition and mechanical probing of nearly spherical, defect-free silicon
nanospheres has been accomplished. The results show silicon at this length scale to be up …

One of the most important reliability problems in micro-electromechanical systems (MEMSs)
is stiction, the adhesion of contacting surfaces due to surface forces. After reviewing the …

Microscopic devices capable of performing sensing, actuation, and control tasks, known as
microelectromechanical systems (MEMS), are expected to lead to new technologies with …