JM Shieh, ZH Chen, BT Dai, YC Wang, A Zaitsev… - Applied physics …, 2004 - pubs.aip.org
Amorphous silicon a-Si was crystallized by femtosecond laser annealing (FLA) using a near-
infrared 800 nm ultrafast Ti: sapphire laser system. The intense ultrashort laser pulses lead …