A batch-fabricated and electret-free silicon electrostatic vibration energy harvester

P Basset, D Galayko, AM Paracha… - Journal of …, 2009 - iopscience.iop.org
This paper presents a novel silicon-based and batch-processed MEMS electrostatic
transducer for harvesting and converting the energy of vibrations into electrical energy …

Study, optimization and silicon implementation of a smart high-voltage conditioning circuit for electrostatic vibration energy harvesting system

A Dudka - 2014 - theses.hal.science
Vibration energy harvesting is a relatively new concept that can be used in powering micro-
scale power embedded devices with the energy of vibrations omnipresent in the …