Analytical Solution of Nonlinear Dynamics in Electrostatically Driven MEMS Scanning Mirrors
C Xia, D Qiao, A Peng, Z Chen, X Song… - Journal of …, 2024 - ieeexplore.ieee.org
This paper presents an analytical solution for the nonlinear dynamics of electrostatically
driven MEMS scanning mirrors. These mirrors are widely used due to their small size, low …
driven MEMS scanning mirrors. These mirrors are widely used due to their small size, low …