Piezoelectric, piezoresistive, and optical fiber sensors have attracted considerable attention
in structural health monitoring (SHM) applications for strain/temperature measurements in …

This paper presents the design and modeling of a novel piezoelectrically driven micro-lens
actuator capable of delivering large out-of-plane displacement with a low driving voltage …

This research investigates the stabilization and control of an uncertain Euler–Bernoulli nano-
beam with fixed ends. The governing partial differential equations of motion for the nano …

This paper on the reports design, fabrication and position monitoring of a micro
electromagnetic linear actuator. The actuator consists of stator, slider, guide, sensors and …

This paper presents the fabrication and characterization of a high performance
piezoelectrically driven micro-lens actuator. The fabrication method involves controlling the …

The design, fabrication, and testing of a novel piezoelectrically driven microlens actuator
with large stroke and low driving voltage is presented. The device is fabricated on a 6 μm …

This paper presents the development of a dynamic analytical model for piezoelectrically
driven micro-lens actuator for micro-optics applications. The model uniquely considers the …

This paper presents a novel high performance piezoelectrically driven microlens actuator for
micro-optics applications. The actuator exhibits large out-of-plane displacement of 228 μm at …

For the first time, a bimorph thin film lead zirconate titanate (PZT) micro‐actuator with thick
polysilicon as a passive structural layer is reported. A simple micro‐cantilever actuator …

In Lead Zirconium Titanate Pb [Zr1-xTix] O3 based piezoelectric transducers, silicon film has
been used as a passive structural layer to enhance the mechanical stability and reliability of …