The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known
technology for label-free sensing which holds promise as a technique for cheap, portable …

Micro-and nanoelectromechanical systems, including cantilevers and other small scale
structures, have been studied for sensor applications. Accurate sensing of gaseous or …

Purpose Pressure, being one of the key variables investigated in scientific and engineering
research, requires critical and accurate measurement techniques. With the advancements in …

With the technological advancement in micro-electro-mechanical systems (MEMS),
microfabrication processes along with digital electronics together have opened novel …

This paper presents an analytical model for support loss in clamped–free (C–F) and
clamped–clamped (C–C) micromachined beam resonators with in-plane flexural vibrations …

Volatile organic compounds (VOCs) are pervasive in the environment. Since the early
1980s, substantial work has examined the detection of these materials, as they can indicate …

This review provides a summary of work on the resonant nonlinear dynamics of micro-and
nanoelectromechanical systems. This research area, which has been active for …

This book on mechanical microsensors is based on a course organized by the Swiss
Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and …

Discusses four kinds of mechanical energy losses in ultrathin micro-cantilevers of 60 nm,
170 nm, and 500 nm in thickness: thermoelastic loss, air damping, support loss, and surface …

A review of micro resonant force gauges is presented. A theoretical description is given of
gauges operating in a flexural mode of vibration, including a discussion of non-linear effects …