Tip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use
a nanometer scale tip to fabricate nanostructures. In this review, we first introduce the history …

With the recent advances in the field of nanotechnology, measurement and manipulation
requirements at the nanoscale have become more stringent than ever before. In atomic force …

The miniaturization of nanometer-sized multicolor fluorescent features is of continuous
significance for counterfeit security features, data storage, and sensors. Recent advances in …

The routine “on demand” fabrication of features smaller than 10 nm opens up new
possibilities for the realization of many devices. Driven by the thermally actuated …

Following a brief historical summary of the way in which electron beam lithography
developed out of the scanning electron microscope, three state-of-the-art charged-particle …

Scanning probe lithography (SPL) describes a group of patterning techniques, wherein
localized tip-sample interactions are utilized in order to directly or indirectly (via a resist film) …

Negative-tone molecular resists are organic small molecule resists that can be
lithographically patterned in the negative tone. This chapter examines a wide variety of …

This chapter describes diverse tip-based nanofabrication methods. The nanoscale precision
of scanning probe lithography down to the atomic and molecular level in combination with …

Patterning at single digit nanoscale is the main bottleneck in the fabrication of next
generation nanoelectronics. In this thesis a Fowler-Nordheim field emission process at the …

The miniaturization of the smallest devices of silicon-based integrated circuits, namely
transistors, using conventional optical lithography techniques reaches slowly their physical …