Piezoresistive microcantilevers for humidity sensing

J Xu, M Bertke, HS Wasisto… - Journal of Micromechanics …, 2019 - iopscience.iop.org
Wide-range humidity sensing and monitoring applications including instrumentation,
agriculture, meteorology, biomedicine, and food processing have attracted long-standing …

Quartz crystal microbalance humidity sensors integrated with hydrophilic polyethyleneimine-grafted polyacrylonitrile nanofibers

A Rianjanu, T Julian, SN Hidayat, N Yulianto… - Sensors and Actuators B …, 2020 - Elsevier
In this work, we devised hybrid humidity sensors by integrating quartz crystal microbalance
(QCM) platforms with polyethyleneimine (PEI)-grafted polyacrylonitrile (PAN) nanofibrous …

In-plane and out-of-plane MEMS piezoresistive cantilever sensors for nanoparticle mass detection

A Setiono, M Bertke, WO Nyang'au, J Xu, M Fahrbach… - Sensors, 2020 - mdpi.com
In this study, we investigate the performance of two piezoresistive micro-electro-mechanical
system (MEMS)-based silicon cantilever sensors for measuring target analytes (ie, ultrafine …

Real-time frequency tracking of an electro-thermal piezoresistive cantilever resonator with ZnO nanorods for chemical sensing

A Setiono, J Xu, M Fahrbach, M Bertke, WO Nyang'au… - Chemosensors, 2019 - mdpi.com
The asymmetric resonance response in electro-thermal piezoresistive cantilever resonators
causes a need of an optimization treatment for taking parasitic actuation-sensing effects into …

Dynamic micromechanical measurement of the flexural modulus of micrometre-sized diameter single natural fibres using a vibrating microcantilever technique

A Reda, T Dargent, S Arscott - Journal of Micromechanics and …, 2023 - iopscience.iop.org
The dynamic response of a structure is a manifestation of its inherent characteristics,
including material density, mechanical modulus, thermo-and viscoelastic properties, and …

[HTML][HTML] Customized piezoresistive microprobes for combined imaging of topography and mechanical properties

M Fahrbach, S Friedrich, H Behle, M Xu… - Measurement …, 2021 - Elsevier
Customized piezoresistive cantilever microprobes with a deflection range of 120​ μm and
silicon tips of 100​ μm height were operated in a Cypher AFM showing their functionality for …

Fabrication of a microcantilever-based aerosol detector with integrated electrostatic on-chip ultrafine particle separation and collection

M Bertke, J Xu, A Setiono, I Kirsch… - Journal of …, 2019 - iopscience.iop.org
In this paper, fabrication and testing of a miniaturized microcantilever-based particulate
matter detector with integrated electrostatic on-chip ultrafine particle (UFP) separation and …

A Novel Harmonic Atomic Force Microscopy With Tip-Sample Couplings

K Feng, J Lai, J Gao, C Cui, B Zhu… - … /ASME Transactions on …, 2023 - ieeexplore.ieee.org
This article presents a novel harmonic atomic force microscopy with tip-sample couplings
(TS-HAFM) working in force modulation mode for imaging samples of different mechanical …

Investigating the potential of using gold nanoparticle-functionalized micromechanical sensors for gamma radiation detection

A Alodhayb, K Shamma, N Alanazi, N Alkathran… - Radiation Physics and …, 2021 - Elsevier
Herein, we investigate the potential of using gold nanoparticle (AuNP)-functionalized
microcantilever surfaces for gamma radiation detection. For this investigation, Si …

Piezoelectric actuators for tactile and elasticity sensing

J Toledo, V Ruiz-Díez, J Hernando-García… - Actuators, 2020 - mdpi.com
Piezoelectric actuators have achieved remarkable progress in many fields, being able to
generate forces or displacements to perform scanning, tuning, manipulating, tactile sensing …