An overview of high frequency acoustic sensors—QCMs, SAWs and FBARs—chemical and biochemical applications
Acoustic devices have found wide applications in chemical and biosensing fields owing to
their high sensitivity, ruggedness, miniaturized design and integration ability with on-field …
their high sensitivity, ruggedness, miniaturized design and integration ability with on-field …
A review of ultrawide bandgap materials: properties, synthesis and devices
Ultrawide bandgap (UWBG) materials such as diamond, Ga2O3, hexagonal boron nitride (h-
BN) and AlN, are a new class of semiconductors that possess a wide range of attractive …
BN) and AlN, are a new class of semiconductors that possess a wide range of attractive …
Universal quantum transducers based on surface acoustic waves
MJA Schütz, MJA Schütz - … : Controlling and Exploiting the Quantum Dot …, 2017 - Springer
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On Rayleigh waves in a piezoelectric semiconductor thin film over an elastic half-space
Some piezoelectric materials, such as zinc oxide (ZnO), have not only piezoelectric property
but also semiconductor characteristics. However, the semiconductor characteristics are …
but also semiconductor characteristics. However, the semiconductor characteristics are …
High precision pressure sensors based on SAW devices in the GHz range
JG Rodríguez-Madrid, GF Iriarte, OA Williams… - Sensors and Actuators A …, 2013 - Elsevier
In this paper, an AlN/free-standing nanocrystalline diamond (NCD) system is proposed in
order to process high frequency surface acoustic wave (SAW) resonators for sensing …
order to process high frequency surface acoustic wave (SAW) resonators for sensing …
Super-high-frequency SAW resonators on AlN/diamond
JG Rodriguez-Madrid, GF Iriarte… - IEEE Electron device …, 2012 - ieeexplore.ieee.org
This letter describes the procedure to manufacture high-performance surface acoustic wave
(SAW) resonators on AlN/diamond heterostructures working at frequencies beyond 10 GHz …
(SAW) resonators on AlN/diamond heterostructures working at frequencies beyond 10 GHz …
Tweaking the mechanical stability of Al1− xWxN ternary nitride alloys for hard coating applications, and study on their structural, photoluminescence and surface …
This study focuses on the synthesis and achievement of ternary Al 1− x W x N nitride films as
hard coating materials. A dual-target DC reactive magnetron sputtering process was used to …
hard coating materials. A dual-target DC reactive magnetron sputtering process was used to …
Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO2/IDT/LiNbO3/Diamond/Si
H Zhang, H Wang - Micromachines, 2021 - mdpi.com
Surface acoustic wave (SAW) devices are widely used in many fields such as mobile
communication, phased array radar, and wireless passive sensor systems. With the upgrade …
communication, phased array radar, and wireless passive sensor systems. With the upgrade …
Surface acoustic wave devices on AlN/3C–SiC/Si multilayer structures
CM Lin, YY Chen, VV Felmetsger… - Journal of …, 2013 - iopscience.iop.org
Surface acoustic wave (SAW) propagation characteristics in a multilayer structure including
a piezoelectric aluminum nitride (AlN) thin film and an epitaxial cubic silicon carbide (3C …
a piezoelectric aluminum nitride (AlN) thin film and an epitaxial cubic silicon carbide (3C …
FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO2/Si Multilayer Structure
A Finite Element Method (FEM) simulation study is conducted, aiming to scrutinize the
sensitivity of Sezawa wave mode in a multilayer AlN/SiO2/Si Surface Acoustic Wave (SAW) …
sensitivity of Sezawa wave mode in a multilayer AlN/SiO2/Si Surface Acoustic Wave (SAW) …