This paper introduces a new baseband equivalent model for the sense mode dynamics of a
MEMS gyroscope providing a more accurate force-feedback controller design applicable to …

In this paper, an accurate model of the MEMS vibratory gyroscope is demonstrated The state
space model has the advantage of being controllable. A Linear Quadratic Tracking (LQT) …

Conventional gyroscopes are equipped with a single-axis control input, limiting their
performance. Although researchers have proposed control algorithms with dual-axis control …

Micro electro mechanical system (MEMS) gyroscope is an important application of MEMS
technology in inertia type instruments. It has the advantages of small volume, light weight …

In this paper, an accurate model of the MEMS vibratory z-axis gyroscope is demonstrated
and an adaptive controller is designed to make the sense mode accelerometer output a …

This thesis presents the development of wafer level vacuum packaging processes using Au-
Si eutectic and glass frit bonding contributing to the improvement of packaging concepts for …

This thesis presents the quasi-static acceleration compensation methods for a fully
decoupled MEMS gyroscope. These methods are based on the utilization of the amplitude …

This thesis, for the first time in the literature, presents an automatic mode-matching system
that uses the phase relationships between the residual quadrature and drive signals in a …

Наиболее эффективным методом идентификации динамических характеристик
резонансной структуры микроэлектромеханического гироскопа (ММГ) является …

This thesis reports development of a novel capacitive enhancement approach for MEMS
gyroscopes with in-plane drive motion. The study includes design, fabrication, post …