Design and development of miniaturized low voltage triangular RF MEMS switch for phased array application

A Gopalan, UK Kommuri - Applied Surface Science, 2018 - Elsevier
Abstract Nowadays, Micro-Electro-Mechanical System (MEMS) is widely used for various
applications ranging from switches to sensors. The central idea of this work is to design and …

Static travel range augmentation of electrostatically actuated slender nano-cantilevers using particle swarm optimisation

KS Pakhare, PJ Guruprasad, RP Shimpi - Archive of Applied Mechanics, 2023 - Springer
Along with the electrostatic force and fringing field effect, the van der Waals (vdW) force acts
on the electrostatically actuated nano-cantilever (EANC) when the separation between …

Static pull-in instability and free vibration of functionally graded graphene nanoplatelet reinforced micro-sandwich beams under thermo-electrical actuation

L Yang, J Peng, F Fang, J Yang - Microsystem Technologies, 2019 - Springer
This paper investigates the static pull-in instability and free vibration of a multilayer
functionally graded graphene nanoplatelet (GPL) reinforced composite (FG-GPLRC) micro …

[PDF][PDF] Design and simulation of microcantilevers for sensing applications

AK Goel, DK Kumar, D Gupta - International Journal of Applied …, 2016 - researchgate.net
MEMS is the integration of active and passive elements on a single chip, which combine
electronics, electrical as well as mechanical elements to use in sensing and actuation …

On the application of Sturm's theorem to analysis of dynamic pull-in for a graphene-based MEMS model

D Omarov, D Nurakhmetov, D Wei… - Applied and …, 2018 - kme.zcu.cz
A novel procedure based on the Sturm's theorem for real-valued polynomials is developed
to predict and identify periodic and non-periodic solutions for a graphene-based MEMS …

Enhancement of static and dynamic travel range of electrostatically actuated microbeams using hybrid simulated annealing

RR Trivedi, A Bhushan, MM Joglekar… - International Journal of …, 2015 - Elsevier
This study focuses on the enhancement of travel range of electrostatically driven
microbeams in static and dynamic mode using hybrid simulated annealing optimization …

Size-dependent behavior of a MEMS microbeam under electrostatic actuation

CI Le, QD Tran, DK Nguyen - Vietnam Journal of Mechanics, 2022 - vjs.ac.vn
The size-dependent behavior of a silicon microbeam with an axial force in MEMS is studied
using a nonlinear finite element procedure. Based on a refined third-order shear …

Design and fabrication of MEMS based electrostatic cantilever as ultrasonic signal generator

S Arya, S Khan, S Kumar, P Lehana - Microelectronic Engineering, 2016 - Elsevier
This paper presents the design and fabrication of a 500 μm× 200 μm× 0.070 μm micro-
cantilever as ultrasonic frequency generator. Actuation energy (up to 4.1 V dc) after fixed …

Static analysis of the micro-cantilever under electrostatic force considering fringing field effects

S Bhojani, R Trivedi, DS Sharma - AIP Conference Proceedings, 2022 - pubs.aip.org
The Micro-electromechanical devices operate under the stable operating range. The
demarcating Voltage and the displacement separating the stable and unstable operating …

Development of algorithms in open-source Elmer FEM for frequency response and biased modal analysis of MEMS cantilever

S Tez, M Kaya - Journal of Computational Electronics, 2021 - Springer
The characteristic of the microelectromechanical systems (MEMS) structures can be
determined by using static, modal and harmonic analyses implemented with finite element …