Along with the electrostatic force and fringing field effect, the van der Waals (vdW) force acts on the electrostatically actuated nano-cantilever (EANC) when the separation between …
L Yang, J Peng, F Fang, J Yang - Microsystem Technologies, 2019 - Springer
This paper investigates the static pull-in instability and free vibration of a multilayer functionally graded graphene nanoplatelet (GPL) reinforced composite (FG-GPLRC) micro …
AK Goel, DK Kumar, D Gupta - International Journal of Applied …, 2016 - researchgate.net
MEMS is the integration of active and passive elements on a single chip, which combine electronics, electrical as well as mechanical elements to use in sensing and actuation …
A novel procedure based on the Sturm's theorem for real-valued polynomials is developed to predict and identify periodic and non-periodic solutions for a graphene-based MEMS …
This study focuses on the enhancement of travel range of electrostatically driven microbeams in static and dynamic mode using hybrid simulated annealing optimization …
CI Le, QD Tran, DK Nguyen - Vietnam Journal of Mechanics, 2022 - vjs.ac.vn
The size-dependent behavior of a silicon microbeam with an axial force in MEMS is studied using a nonlinear finite element procedure. Based on a refined third-order shear …
S Arya, S Khan, S Kumar, P Lehana - Microelectronic Engineering, 2016 - Elsevier
This paper presents the design and fabrication of a 500 μm× 200 μm× 0.070 μm micro- cantilever as ultrasonic frequency generator. Actuation energy (up to 4.1 V dc) after fixed …
S Bhojani, R Trivedi, DS Sharma - AIP Conference Proceedings, 2022 - pubs.aip.org
The Micro-electromechanical devices operate under the stable operating range. The demarcating Voltage and the displacement separating the stable and unstable operating …
S Tez, M Kaya - Journal of Computational Electronics, 2021 - Springer
The characteristic of the microelectromechanical systems (MEMS) structures can be determined by using static, modal and harmonic analyses implemented with finite element …