This article discusses the transition of a form of nanoimprint lithography technology, known
as Jet and Flash Imprint Lithography (J-FIL), from research to a commercial fabrication …

The escalating cost of next generation lithography (NGL) is driven in part by the need for
complex sources and optics. The cost for a single NGL tool could soon exceed $50 million, a …

Flexure hinges hold several advantages over classical rotation joints, including no friction
losses, no need for lubrication, no hysteresis, compactness, capacity to be utilized in small …

This paper presents the design of a novel, low-cost nano-manipulator which uses a six-axis
compliant mechanism which is driven by electromagnetic actuators. The mechanism's …

Described are imprint lithography templates, methods of forming and using the templates,
and a template holder device. An imprint lithography template may include a body with a …

Processes and associated devices for high precision positioning of a template an substrate
during imprint lithography includes a calibration system with a course calibration stage and …

A key hurdle to meet the needs of micro/nano manipulation in some complex cases is the
inadequate workspace and flexibility of the operation ends. This paper presents a 6-degree …

Optical lithography is being extended to pattern ever-smaller features. A combination of
improvements in optics, further reduction in wavelength, and introduction of more complex …

Step and Flash TM Imprint Lithography (S-FIL TM) process is a step and repeat nano-
replication technique based on UV curable low viscosity liquids. Molecular Imprints, Inc.(MII) …

4,694,703 A 9/1987 Routson A method of determining and correcting alignment during
4,707,218 A 11/1987 Giammarco et al. imprint lithography process is described. During an …