3D integrated circuit cooling with microfluidics

S Wang, Y Yin, C Hu, P Rezai - Micromachines, 2018 - mdpi.com
Using microfluidic cooling to achieve thermal management of three-dimensional integrated
circuits (ICs) is recognized as a promising method of extending Moore law progression in …

Through-silicon vias: drivers, performance, and innovations

PA Thadesar, X Gu, R Alapati… - IEEE Transactions on …, 2016 - ieeexplore.ieee.org
To address the abating performance improvements from device scaling, innovative 2.5-D
and 3-D integrated circuits with vertical interconnects called through-silicon vias (TSVs) …

Embedded cooling technologies for densely integrated electronic systems

TE Sarvey, Y Zhang, L Zheng… - 2015 IEEE Custom …, 2015 - ieeexplore.ieee.org
In modern integrated systems, interconnect and thermal management technologies have
become two major limitations to system performance. In this paper, a number of …

Integrated circuit package with enhanced cooling structure

R Gutala, A Rahman, K Chandrasekar - US Patent 10,504,819, 2019 - Google Patents
An integrated circuit package may include an integrated circuit die having first and second
circuit regions and a surface. The first circuit region of the integrated circuit package has an …

Electronic device including an insulating structure

GM Grivna, SM Etter, H Suzuki, M Ichiyanagi… - US Patent …, 2018 - Google Patents
An electronic device can include a substrate and an insulating structure. In an aspect, an
anchor can include a portion of the substrate that extends into the insulating structure or a …

Electronic device including a conductive structure surrounded by an insulating structure

GM Grivna - US Patent 9,991,338, 2018 - Google Patents
An electronic device can include a substrate and an insulating structure laterally surrounded
by the substrate. In an aspect, the electronic device can include a first conductive structure or …

Interconnection technology innovations in 2.5 D integrated electronic systems

PA Thadesar, PK Jo, MS Bakir - Advances in Embedded and …, 2019 - Wiley Online Library
Vertical interconnections, called through‐silicon vias (TSVs), play a key role in enabling
silicon interposer‐based 2.5 D integration (and 3D chip stacking). HIST 2.5 D integration …

Advances in Embedded and Fan‐Out Wafer‐Level Packaging Technologies

B Keser - Wiley Online Library
When designing an electronic package, there are many material challenges to consider,
both in the semiconductor die and in the package. The die may have fragile low dielectric …

Electronic device including an insulating structure

GM Grivna, SM Etter, H Suzuki, M Ichiyanagi… - US Patent …, 2020 - Google Patents
An electronic device can include a substrate and an insulating structure. In an aspect, an
anchor can include a portion of the substrate that extends into the insulating structure or a …

Process of forming an electronic device including forming an electronic component and removing a portion of a substrate

A Salih, GM Grivna - US Patent 10,497,602, 2019 - Google Patents
An electronic device can include a semiconductor material and a semiconductor layer
overlying the semiconductor material, wherein the semiconductor layer has a greater …