Fully differential higher order transverse mode piezoelectric membrane resonators for enhanced liquid-phase quality factors

H Begum, J Qian, JEY Lee - Journal of Micromechanics and …, 2021 - iopscience.iop.org
This paper investigates the characteristics of higher-order transverse mode fully clamped
membrane resonators that are piezoelectrically transduced as a class of resonators that …

Feedthrough Engineering to Enable Resonant Sensors Working in Conductive Medium for Bio Applications

ZW Lin, CY Wu, SS Li - Journal of Microelectromechanical …, 2024 - ieeexplore.ieee.org
Operating micro-nanoscale sensors in conductive liquids faces challenges due to liquid
damping and high feedthrough floor, leading to low signal-to-feedthrough ratio. This work …

A novel feedthrough cancellation technique for piezoelectric MEMS resonant sensors in ionic liquid medium

CY Wu, ZW Lin, SS Li - 2023 IEEE 36th International …, 2023 - ieeexplore.ieee.org
This work presents a thin-film piezoelectric-on-silicon (TPoS) resonator and oscillator
operating in an ionic (ie, conductive) liquid environment without suffering from existing ionic …

Acoustoelectric amplification in piezoelectric-silicon micromachined Lamb wave devices

H Mansoorzare - 2021 - stars.library.ucf.edu
In this dissertation, heterostructured micro-acoustic devices are explored that leverage the
interactions between acoustic phonons and electrons to enable radio frequency (RF) signal …

Polymer-based and Functionalized 3D Microelectrode Array (MEA) Biosensors

N Azim - 2021 - stars.library.ucf.edu
Microphysiological systems are three-dimensional (3D) in vitro systems that recapitulate
crucial biological aspects of cell heterogeneity and native tissue architecture by mimicking …