The development of micromachined gyroscope structure and circuitry technology

D Xia, C Yu, L Kong - Sensors, 2014 - mdpi.com
This review surveys micromachined gyroscope structure and circuitry technology. The
principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS …

An automatically mode-matched MEMS gyroscope with wide and tunable bandwidth

S Sonmezoglu, SE Alper, T Akin - Journal of …, 2014 - ieeexplore.ieee.org
This paper presents the architecture and experimental verification of the automatic mode-
matching system that uses the phase relationship between the residual quadrature and …

Design and development of a MEMS vibrating ring resonator with inner rose petal spring supports

I Khan, DSK Ting, MJ Ahamed - Microsystem Technologies, 2021 - Springer
This paper presents a novel MEMS based ring resonator design inspired by the rose petal
structure. The proposed design has four petal springs supporting the ring structure …

Design and implementation of an optimized double closed-loop control system for MEMS vibratory gyroscope

F Chen, W Yuan, H Chang, G Yuan, J Xie… - IEEE Sensors …, 2013 - ieeexplore.ieee.org
This paper describes the development and experimental evaluation of a
microelectromechanical system vibratory gyroscope using an optimized double closed-loop …

An automatically mode-matched MEMS gyroscope with 50 Hz bandwidth

S Sonmezoglu, SE Alper, T Akin - 2012 IEEE 25th International …, 2012 - ieeexplore.ieee.org
This paper presents the architecture and experimental verification of an automatic mode
matching system that uses the phase relationship between the residual quadrature and …

Design and Demonstration of a Microelectromechanical System Single-Ring Resonator with Inner Ring-Shaped Spring Supports for Inertial Sensors

I Khan, AR Ranji, G Nagesh, DSK Ting, MJ Ahamed - Sensors, 2023 - mdpi.com
This paper presents a novel single-ring resonator design and experimentally demonstrates
its dynamic behavior. The proposed ring resonator design is simple and has a solid anchor …

A novel oscillation control for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation technique

W Ma, Y Lin, S Liu, X Zheng, Z Jin - Journal of Micromechanics …, 2016 - iopscience.iop.org
This paper reports a novel oscillation control algorithm for MEMS vibratory gyroscopes using
a modified electromechanical amplitude modulation (MEAM) technique, which enhances the …

Design of oscillation control loop with coarse-precision mode transition for solid-state resonant gyroscope

JW Song, HM Song, YJ Lee, CG Park… - IEEE Sensors …, 2015 - ieeexplore.ieee.org
This paper presents a dual mode oscillation control loop design for a solid-state
hemispherical resonator gyroscope (HRG) which uses the hemispherical vibrating shell for …

The stabilization system of primary oscillation for a micromechanical gyroscope

P Baranov, T Nesterenko, E Tsimbalist… - Measurement Science …, 2017 - iopscience.iop.org
The mode of primary oscillations of a micromechanical gyroscope (MMG) sensor is provided
by an electrostatic comb-drive actuator in which the interaction between the …

Compensation methos for quasi-static acceleration sensitivity of MEMS gyroscopes

HD Gavcar - 2014 - open.metu.edu.tr
This thesis presents the quasi-static acceleration compensation methods for a fully
decoupled MEMS gyroscope. These methods are based on the utilization of the amplitude …