Laser-induced periodic surface structures (LIPSS) formation on the surface of mono-
crystalline silicon is reported for a specific fabrication regime of large-area structuring. Using …

Direct laser writing of amorphous lines in crystalline silicon has the potential for becoming a
flexible alternative to silicon‐on‐insulator technology for photonic integrated circuits. Yet, the …

Direct femtosecond (fs) laser surface structuring became a versatile way to generate surface
structures on solid targets demonstrating a high degree of flexibility and controllability in …

This paper reports the ultrafast imaging on the formation of periodic surface ripples induced
by a single 800 nm, 50 fs laser pulse. The evolution process is observed on a Si surface with …

Using lasers to achieve controlled crystallographic phase changes in silicon with high
spatial precision promises new manufacturing solutions in semiconductor technologies …

The replication of complex structures found in nature represents an enormous challenge
even for advanced fabrication techniques, such as laser processing. For certain …

Laser-based amorphization on the back surface of a 525-μm thick crystalline silicon sample
is studied. To deposit sufficient energy for a local change from a crystalline to an amorphous …

Femtosecond laser has been widely utilized for modification of crystal structure to achieve
desired functions. So far, however, the effect of crystallographic orientation on the induced …

The so-called D-squared or Liu's method is an extensively applied approach to determine
the irradiation fluence thresholds for laser-induced damage or modification of materials …

The formation of periodic surface structures is a general effect of femtosecond laser
irradiation of solid targets showing promising interest in material science and technology …