Stitching-aware in-design DPT auto fixing for sub-20nm logic devices
SH Choi, SK KVVS… - … -Process-Technology Co …, 2017 - spiedigitallibrary.org
As the technology continues to shrink below 20nm, Double Patterning Technology (DPT)
becomes one of the mandatory solutions for routing metal layers. From the view point of …
becomes one of the mandatory solutions for routing metal layers. From the view point of …
Multiple patterning layout compliance with minimizing topology disturbance and polygon displacement
HY Chang, IHR Jiang - … of the 2019 International Symposium on …, 2019 - dl.acm.org
Multiple patterning lithography (MPL) divides a layout into several masks and manufactures
them by a series of exposure and etching steps. As technology advances, MPL is still …
them by a series of exposure and etching steps. As technology advances, MPL is still …