The majority of microelectromechanical system (MEMS) devices must be combined with
integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers …

Microfluidics is an emerging field that has given rise to a large number of scientific and
technological developments over the last few years. This review reports on the use of …

This paper presents a review of silicon micromachined accelerometers and gyroscopes.
Following a brief introduction to their operating principles and specifications, various device …

Surface micromachining is characterized by the fabrication of micromechanical structures
from deposited thin films. Originally employed for integrated circuits, films composed of …

Mechatronics has evolved into a way of life in engineering practice, and indeed pervades
virtually every aspect of the modern world. As the synergistic integration of mechanical …

This paper reviews the recent progress in MEMS for radio frequency (RF) applications from
a device perspective. RF MEMS devices reviewed include switches and relays, tunable …

The tribological phenomena of adhesion, friction, and wear arise when solid objects make
contact. As the size of devices shrinks to micro-and nanoscales, the surface-to-volume ratio …

This book on mechanical microsensors is based on a course organized by the Swiss
Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and …

This paper describes a CMOS capacitive sensing amplifier for a monolithic MEMS
accelerometer fabricated by post-CMOS surface micromachining. This chopper stabilized …

Silicon dioxide sacrificial layer etching has become a major surface micromachining method
to fabricate microsensors and microactuators often made of polycrystalline silicon. An …