A humidity sensor based on a hetero-core optical fiber

S Akita, H Sasaki, K Watanabe, A Seki - Sensors and Actuators B …, 2010 - Elsevier
A new type of fiber optic sensor has been developed for sensing relative humidity (RH). This
RH sensor was fabricated by using a hetero-core optical fiber structure that was coated with …

Optical-fiber measurement systems for medical applications

S Silvestri, E Schena - Optoelectronics: Devices and …, 2011 - books.google.com
After telecommunications, also medicine has been revolutionized by optical fibers. They
were firstly used, in the early sixties, to visualize internal anatomical sites by illuminating …

Computer aided modelling and diaphragm design approach for high sensitivity silicon-on-insulator pressure sensors

M Narayanaswamy, RJ Daniel, K Sumangala… - Measurement, 2011 - Elsevier
Silicon on insulator (SOI) pressure sensor diaphragm is a composite structure of the buried
oxide and the SOI layer. This paper brings out the inadequacy of the existing analytical …

MOEMS uniaxial accelerometer based on EpoClad/EpoCore photoresists with built-in fiber clamp

T Guan, G Keulemans, F Ceyssens, R Puers - Sensors and Actuators A …, 2013 - Elsevier
In this paper, a novel polymer MOEMS (micro-opto-electro-mechanical systems)
accelerometer is reported. Low cost, photopatternable epoxies, EpoClad and EpoCore, are …

Integrating optical waveguides in electrowetting-on-dielectric digital microfluidic chips

F Ceyssens, D Witters, T Van Grimbergen… - Sensors and Actuators B …, 2013 - Elsevier
Readout through a microscope-based setup is one of the most prevalent optical detection
methods used in current digital (ie droplet-based) electrowetting-on-dielectric lab-on-chip …

Determining the Young's modulus and creep effects in three different photo definable epoxies for MEMS applications

K Wouters, R Puers - Sensors and Actuators A: Physical, 2009 - Elsevier
In this study, a fundamental measurement of the Young's modulus of Epoclad and Epocore
negative photo resist is performed, using a miniature tensile test setup. The experiments …

All-SiC fiber-optic sensor for pressure and temperature dual-mode sensing in harsh environments

H Li, J Liu, T Sheng, J Li, D Zhang, Y Jiang - Sensors and Actuators A …, 2024 - Elsevier
This paper presents a fiber-optic Fabry–Perot (FP) sensor with an all-silicon carbide (SiC)
structure for pressure and temperature dual-mode sensing in harsh environments. The all …

850-nm polymeric waveguide thermo-optic switch with low power-consumption

D Niu, D Zhang, K Yang, T Lian, S Sun, B Li… - Optics & Laser …, 2020 - Elsevier
In this paper, a polymeric waveguide thermo-optic switch with low power-consumption was
demonstrated, which was based on the Mach-Zehnder interferometer structure and …

An EpoClad/EpoCore-based platform for MOEMS fabrication

T Guan, F Ceyssens, R Puers - Journal of Micromechanics and …, 2013 - iopscience.iop.org
EpoClad and EpoCore are the photopatternable epoxies with slightly different refractive
indices that were developed to create optical waveguides. In this paper, we present a …

An optical absolute pressure sensor for high-temperature applications, fabricated directly on a fiber

F Ceyssens, M Driesen, R Puers - Journal of Micromechanics and …, 2009 - iopscience.iop.org
Fiber optical pressure sensors show great promise in monitoring harsh environments as
sensitive readout electronics can be located remotely. In this paper, a process based on thin …