Mask-shifting-based projection lithography for microlens array fabrication

J Gong, J Zhou, H Sun, S Hu, J Wang, J Liu - Photonics, 2023 - mdpi.com
Microlens arrays play a critical role in enhancing imaging systems due to their outstanding
optical performance, compact size, and lightweight nature. However, traditional fabrication …

Height modulation of nanopixel arrays via light controlled capillary force lithography

MG Ji - 2024 - search.proquest.com
Conventional nanotextures typically consist of arrays of identical nanopixels. Recently,
efforts have focused on enhancing their functionalities by introducing spatial modulation to …

Mask-Moving-Lithography-Based High-Precision Surface Fabrication Method for Microlens Arrays

J Gong, J Zhou, J Liu, S Hu, J Wang, H Sun - Micromachines, 2024 - mdpi.com
Microlens arrays, as typical micro-optical elements, effectively enhance the integration and
performance of optical systems. The surface shape errors and surface roughness of …

Highly Nonlinear Behavior of UV-curable Photopolymer during Low-Pressure Nanoimprinting

RI Sikder, MG Ji, JJ Kim - 2024 International Conference on …, 2024 - ieeexplore.ieee.org
Understanding the dynamics of photopolymers in nanoscale environment is critical to many
soft-lithographic techniques. Here, we report a highly nonlinear behavior of photopolymer …

Highly nonlinear behavior of UV-curable photopolymer under elastomer-templated low-pressure nanoimprinting

MG Ji, RI Sikder, J Kim - MOEMS and Miniaturized Systems …, 2024 - spiedigitallibrary.org
Understanding the dynamic behavior of photopolymers in nanoscale environment is
essential to improving MEMS/NEMS device fabrication technologies. Here, we unveil the …

Height-modulation of diffraction gratings by light-controlled capillary force lithography for structural coloring

MG Ji, J Kim - MOEMS and Miniaturized Systems XXII, 2023 - spiedigitallibrary.org
Diffraction gratings are ubiquitous in many optical applications such as sensors, filters, and
optical security devices. Capillary force lithography, which utilizes the capillary rise of …