Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

This paper presents a study on dynamics of a dual-mass MEMS vibratory gyroscope in
presence of fabrication imperfections and reports a method for precision electrostatic …

The Electromechanical Amplitude Modulation (EAM) is frequently used to eliminate feed-
through signals between forcer and pick-off electrodes of resonant microstructures …

This paper reports a new design strategy of adding lumped masses to the frame structure of
a disk resonator gyroscope (DRG) to mitigate its figure of merit (FOM). A greatly enhanced …

This paper reports mechanical ablation techniques for permanent frequency tuning of the
primary wineglass modes in planar gyroscopes with concentric ring suspension. Three …

This paper presents a multi-stage noise shaping (MASH) switched-capacitor (SC) sigma-
delta (ΣΔ) analog-to-digital converter (ADC) composed of an analog modulator with an on …

This paper presents our latest test results of an amplitude amplified dual-mass MEMS
gyroscope. We discuss the effects of quadrature errors, parasitic capacitance, and frontend …

We identified the mechanical mode coupling as a major energy loss mechanism limiting the
quality factor of MEMS resonators, such as gyroscopes. An analytical model was derived to …

Capturing a near-perfect, artefact free signal is an ideal of biomedicine. However, this
depends on the removal of different types of artefact, all of which can be considered …

Multi-Degree-of-Freedom MEMS Coriolis Vibratory Gyroscopes Designed for Dynamic
Range, Robustness, and Sensitivity Page 1 Inertial Sensors and Systems 2018 …