S Beyer, S Dünkel, M Trentzsch, J Müller… - 2020 IEEE …, 2020 - ieeexplore.ieee.org
With the discovery of ferroelectricity in HfO 2 based thin films and the co-integration of
ferroelectric field effect transistors (FeFET) into standard high-k metal gate (HKMG) CMOS …