This paper focuses on a main subject encountered in the design process of the hexagonal
ducts etched in〈 100〉 silicon, namely, the achievement of the Poiseuille number Po for the …

Purpose–To introduce an efficient two‐dimensional numerical procedure for a three‐
dimensional internal flow through a complex passage with a small depth, in which the …

Two types of microfluidic amplifiers (wall-attachment and jet-deflection) have been
implemented in silicon using standard micromachining methods and anodic sealing with a …

We analyzed microfluidic oscillators operating with liquids (water, isopropilic alcohol, and
acetone) or gases (nitrogen, argon, and carbon dioxide), using numerical simulation. The …

The paper presents a study concerning the velocity field of the fully developed laminar flow
in a hexagonal duct. This duct is the main part of an actuator–sensor structure used for the …

Two types of microfluidic amplifiers (unvented wall attachment and jet deflection) were
examined using dry nitrogen as the test fluid. The devices were fabricated in silicon using …

A simple non vented microfluidic amplifier (hydraulic diameter= 32 µm) was built using
silicon micromachining and the input pressures/flows and output flows were measured …

An efficient two-dimensional (2-D) analytical and numerical procedure has been proposed
to investigate three-dimensional (3-D) internal flows through a passage with a spatially …

The use of PECVD SiO2 as a sacrificial layer in the fabrication of free-standing in situ
phosphorous doped polysilicon filaments was investigated. Different TEOS/O2 flow ratios …

This article analyzes the performance of jet deflection microfluidic amplifiers implemented in
silicon, using microchannels with a minimum hydraulic diameter of~ 40 w m. The …