An alignment target includes periodic patterns on two ele ments. The alignment target
includes two locations, at least one of which has a designed in offset. In one embodiment …

An overlay target for spectroscopic measurement includes at least two diffraction gratings,
one grating overlying the other. The diffraction gratings may include an asymmetry relative to …

Gold et al.................. 356/369 odic patterns with an incident beam having a Single polar
ization State and detecting the intensity of the resulting polarized light, it can be determined …

4,172,664 A 10/1979 Charsky et al............ 356/356 An alignment target includes periodic
patterns on two ele s: A linkish et al........ S. ments. The periodic patterns are aligned when …

A normal incidence reflectometer includes a rotatable analyzer/polarizer for measurement of
a diffracting structure. Relative rotation of the analyzer/polarizer with respect to the diffracting …

An alignment target includes periodic patterns on two ele ments. The alignment target
includes two locations, at least one of which has a designed in offset. In one embodiment …

3, 947688 A 3/1976 Massey........ 250/495 vide an accurate characterization of complex
grating 3,992,104. A 11/1976 Watanabe..... 356/117 Structures, eg, Structures with sloping …

An alignment target includes periodic patterns on two elements. The periodic patterns are
aligned when the two elements are properly aligned. By measuring the two periodic patterns …

This study proposes a Nipkow-based pinhole disk laser scanning confocal microscopic
imaging system for ordinary optical microscopy, fluorescence microscopy, and confocal …

Image contrast enhancement, high lateral resolution, and height information are obtained
with induced polarization evanescent imaging using a solid immersion lens. Experiments …