Influence of microwave driver coupling design on plasma density at Testbench for Ion sources Plasma Studies, a 2.45 GHz Electron Cyclotron Resonance Plasma …

A Megía-Macías, OD Cortázar… - Review of Scientific …, 2014 - pubs.aip.org
A comparative study of two microwave driver systems (preliminary and optimized) for a 2.45
GHz hydrogen Electron Cyclotron Resonance plasma generator has been conducted. The …

Ultra-fast intensified frame images from an electron cyclotron resonance hydrogen plasma at 2.45 GHz: Some space distributions of visible and monochromatic …

OD Cortázar, A Megía-Macías… - Review of Scientific …, 2014 - pubs.aip.org
First results from an ultra-fast frame image acquisition diagnostic coupled to a 2.45 GHz
microwave hydrogen discharge are presented. The plasma reactor has been modified to …

Time evolution of the electron energy distribution function in pulsed microwave magnetoplasma in H2

JL Jauberteau, I Jauberteau, OD Cortázar… - Physics of …, 2016 - pubs.aip.org
Time evolution of the Electron Energy Distribution Function (EEDF) is measured in pulsed
hydrogen microwave magnetoplasma working at 2.45 GHz. Analysis is performed both in …

[HTML][HTML] Determination of the electron energy distribution function in weakly ionized plasma by means of a Langmuir probe and numerical methods

JL Jauberteau, I Jauberteau - AIP Advances, 2024 - pubs.aip.org
Numerical methods are used to determine the Electron Energy Distribution Function (EEDF)
from I (V) probe characteristics, which are measured using a cylindrical Langmuir probe in …

Langmuir probe in magnetized plasma: Determination of the electron diffusion parameter and of the electron energy distribution function

JL Jauberteau, I Jauberteau… - … to Plasma Physics, 2020 - Wiley Online Library
This work is devoted to a new method used to determine the electron diffusion parameter
and the electron energy distribution function (EEDF) in magnetized plasma, by means of a …

Designing resonance microwave cavities to optimize plasma generation

A Megía-Macías, E Barrios-Díaz… - IEEE Transactions …, 2019 - ieeexplore.ieee.org
Methodology for designing the 2.45-GHz microwave (MW) coupling system to optimize the
hydrogen plasma density in an electron cyclotron resonance (ECR) plasma reactor is …

Temperature and density evolution during decay in a 2.45 GHz hydrogen electron cyclotron resonance plasma: Off-resonant and resonant cases

OD Cortázar, A Megía-Macías… - Review of Scientific …, 2013 - pubs.aip.org
Time resolved electron temperature and density measurements during the decay stage in a
hydrogen electron cyclotron resonance (ECR) plasma are presented for a resonance and off …

Time resolved plasma diagnostics for pulsed 2.45 GHz hydrogen discharges

A Megía-Macías, E Barrios-Díaz… - Review of Scientific …, 2021 - pubs.aip.org
A review of the last ten years of advances in temporal resolved plasma diagnostics for
pulsed operated 2.45 GHz microwave-driven hydrogen discharges is presented. Special …

Strongly eccentric rotational plasma lamina observed in a 2.45-GHz hydrogen discharge

OD Cortázar, A Megía-Macías - IEEE Transactions on Plasma …, 2016 - ieeexplore.ieee.org
A novel strongly eccentric rotating plasma lamina structure subtending approximately an
angle of 120° is reported in a 2.45-GHz driven electron cyclotron resonance hydrogen …

Effects of gas adsorbed on solid surface during gas breakdown in electron cyclotron resonance discharges

SH Fu, ZF Ding - Plasma Sources Science and Technology, 2021 - iopscience.iop.org
The microwave breakdown power (P wb) in an ECR plasma source was not merely
determined by pressure (gas flow rate), but found to vary with the time interval between two …