[图书][B] Quantification and Minimization of Energy Loss Mechanisms in Microelectromechanical Resonators
GD Vukasin - 2021 - search.proquest.com
This work focuses on quantifying and minimizing energy loss in encapsulated capacitive
microelectromechanical (MEM) resonators. This is important to reduce phase and frequency …
microelectromechanical (MEM) resonators. This is important to reduce phase and frequency …