The integration of microactuators within a silicon photonic chip gave rise to the field of
optical micro‐electro‐mechanical systems (MEMS) that was originally driven by the …

Deep learning DL models of NIR spectral data outperforms traditional chemometrics
algorithms specially when analyzing complicated materials spectra with overlapping bands …

We report a refractive index (RI) sensor based on the use of vertically etched silicon Bragg
reflectors. The device is robust and performs measurements through tens of micrometers of …

This paper focuses on deep reactive ion etching (DRIE) of sub-micrometer features. Very
high aspect ratios up to 160: 1 on trenches of 250 nm have been achieved using the Bosch …

We propose a tunable erbium doped fiber laser based on a Fabry-Pérot (FP) cavity tuned by
an electrostatic actuator. The device is made of single crystalline silicon. The FP cavity …

In this letter, we report a wide tuning range MEMS-based swept laser source using deep
reactive ion etching on an SoI substrate. A MEMS Fabry-Pérot filter with a free-spectral …

Miniaturized optical benches process free-space light propagating in-plane with respect to
the substrate and have a large variety of applications, including the coupling of light through …

This paper presents 3D Fabry–Pérot (FP) cavities fabricated directly onto cleaved ends of
low-loss optical fibers by a two-photon polymerization (2PP) process. This fabrication …

We present recent advances in modeling, design, and fabrication of in-plane multilayer
optical resonators fabricated by high aspect ratio etching of silicon. We first revisit the model …

We propose an optomechanical design, consisting of a parity-time symmetric multilayer
structure tuned at exceptional-point degeneracy (EPD), with an adjustable layer that is …