Emerging SiC applications beyond power electronic devices
In recent years, several new applications of SiC (both 4H and 3C polytypes) have been
proposed in different papers. In this review, several of these emerging applications have …
proposed in different papers. In this review, several of these emerging applications have …
Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMS
A search of the recent literature reveals that there is a continuous growth of scientific
publications on the development of chemical vapor deposition (CVD) processes for silicon …
publications on the development of chemical vapor deposition (CVD) processes for silicon …
High-dynamic-range chipless microwave resonator-based strain sensor
M Baghelani, Z Abbasi… - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
Microwave split-ring resonators are utilized as sensors in a wide variety of applications due
to their remarkable features, such as extremely low cost, high sensitivity, and relatively high …
to their remarkable features, such as extremely low cost, high sensitivity, and relatively high …
Bending classification from interference signals of a fiber optic sensor using shallow learning and convolutional neural networks
LM Valentín-Coronado, R Martínez-Manuel… - Pattern Recognition …, 2024 - Elsevier
Bending monitoring is critical in engineering applications, as it helps determine any
structural deformation caused by load action or fatigue effect. While strain gauges and …
structural deformation caused by load action or fatigue effect. While strain gauges and …
Concepts and key technologies of microelectromechanical systems resonators
T Feng, Q Yuan, D Yu, B Wu, H Wang - Micromachines, 2022 - mdpi.com
In this paper, the basic concepts of the equivalent model, vibration modes, and conduction
mechanisms of MEMS resonators are described. By reviewing the existing representative …
mechanisms of MEMS resonators are described. By reviewing the existing representative …
Measurement of residual stress and Young's modulus on micromachined monocrystalline 3C-SiC layers grown on< 111> and< 100> silicon
3C-SiC is an emerging material for MEMS systems thanks to its outstanding mechanical
properties (high Young's modulus and low density) that allow the device to be operated for a …
properties (high Young's modulus and low density) that allow the device to be operated for a …
A high aspect ratio surface micromachined accelerometer based on a SiC-CNT composite material
Silicon carbide (SiC) is recognized as an excellent material for microelectromechanical
systems (MEMS), especially those operating in challenging environments, such as high …
systems (MEMS), especially those operating in challenging environments, such as high …
[HTML][HTML] Mechanical and electrical characterization of resonant piezoelectric microbridges for strain sensing
M Schlögl, S Köpl, J Hiesberger, M Schneider… - Sensors and Actuators A …, 2022 - Elsevier
This work reports on a resonantly operated piezoelectric MEMS strain sensor based on a
microbridge structure. The resonator is excited with a sputtered aluminum nitride layer and …
microbridge structure. The resonator is excited with a sputtered aluminum nitride layer and …
Impact of Doping on Cross-Sectional Stress Assessment of 3C-SiC/Si Heteroepitaxy
In this paper, we used micro-Raman spectroscopy in cross-section to investigate the effect of
different doping on the distribution of stress in the silicon substrate and the grown 3C-SiC …
different doping on the distribution of stress in the silicon substrate and the grown 3C-SiC …
Nonparametric identification of a MEMS resonator actuated by levitation forces
This work presents nonparametric identification of a Micro-Electro-Mechanical Systems
(MEMS) beam subjected to a non-classical nonlinear electrostatic (levitation) force. The …
(MEMS) beam subjected to a non-classical nonlinear electrostatic (levitation) force. The …