Polymers are attractive materials for the fabrication of micro-electro-mechanical system
(MEMS) microphones because of their low Young's moduli, generally lower processing …

This paper presents a novel design, fabrication and characterization of an electrostatic micro-
energy scavenger, converting the environmental vibration. The design incorporates MEMS …

This paper presents the simulation of a z-axis SU-8 capacitive accelerometer. The study
consists of a modal analysis of the modeled accelerometer, a study relating capacitance to …

This work presents an SU-8 surface micromachining process using amorphous silicon as a
sacrificial material, which also incorporates two metal layers for electrical excitation. SU-8 is …

Vibrational energy harvesters convert kinetic energy from environment to useful electrical
energy to power wireless sensor networks. These devices are finding applications in …

This paper presents a novel design, modeling and optimization of an electrostatic micro
energy scavenger using the environmental vibration energy on systems like aircraft fuselage …

Nowadays wireless sensors are widely used in all kinds of fields such as biomedical,
commercial and military. Micro energy harvesters converting the wasteful energy from …

This paper presents the simulation of a z-axis SU-8 capacitive accelerometer. The study
consists of a modal analysis of the modeled accelerometer, a study relating capacitance to …