Formation and elimination mechanism of thermal blistering in Al2O3/Si system
S Zhao, G Yuan, D Zhang, P Xu, G Li, W Han - Journal of Materials …, 2021 - Springer
The local delamination of dielectric oxides, manifesting as blistering, is always a puzzle
preventing films from practical applications. In this work, an elaborate study on thermal …
preventing films from practical applications. In this work, an elaborate study on thermal …
Tribological study of hafnium dioxide and aluminium oxide films grown by atomic layer deposition on glass substrate
In the present work we studied the mechanical properties of hafnium dioxide (HfO 2) and
aluminium oxide (Al 2 O 3) thin films deposited on glass at low temperature by means of …
aluminium oxide (Al 2 O 3) thin films deposited on glass at low temperature by means of …
Impact of doping and silicon substrate resistivity on the blistering of atomic-layer-deposited aluminium oxide
J Ott, TP Pasanen, A Gädda, M Garín, K Rosta… - Applied Surface …, 2020 - Elsevier
Abstract Aluminium oxide (Al 2 O 3) thin films grown at low temperatures using atomic layer
deposition (ALD) are known to often suffer from local delamination sites, referred to as …
deposition (ALD) are known to often suffer from local delamination sites, referred to as …
Integration of atomic layer deposited aluminum oxide as surface passivation layer into silicon solar cell
S Li - 2023 - aaltodoc.aalto.fi
Increasing the portion of renewable energy in terms of total world energy production is one
of the key factors in solving many environmental and social problems around the world, for …
of the key factors in solving many environmental and social problems around the world, for …
Low-Temperature, Ultra-Giant Blistering of Atomic Layer Deposited Barrier Coatings on Polyethylene Films Caused by Additive Segregation
JJ Tomán, E Baradács, G Vecsei, L Nagy… - Ultra-Giant Blistering of … - papers.ssrn.com
Low-temperature plasma enhanced atomic layer deposition (PE-ALD) is an advanced
method for coating flexible polyolefin polymers such as low-density polyethylene (LDPE) to …
method for coating flexible polyolefin polymers such as low-density polyethylene (LDPE) to …