Precursors for direct-write nanofabrication with electrons
Focused electron beam-induced deposition (FEBID) is a maskless, direct-write
nanolithography approach for the growth of nanostructures. In recent years, significant …
nanolithography approach for the growth of nanostructures. In recent years, significant …
[HTML][HTML] Writing 3D nanomagnets using focused electron beams
Focused electron beam induced deposition (FEBID) is a direct-write nanofabrication
technique able to pattern three-dimensional magnetic nanostructures at resolutions …
technique able to pattern three-dimensional magnetic nanostructures at resolutions …
[HTML][HTML] Coordination and organometallic precursors of group 10 and 11: Focused electron beam induced deposition of metals and insight gained from chemical …
Nanostructured materials made from group 10 (Ni, Pd, Pt) and group 11 (Cu, Ag, Au)
elements have outstanding technological relevance in microelectronics, nano-optics …
elements have outstanding technological relevance in microelectronics, nano-optics …
Metals by Micro‐Scale Additive Manufacturing: Comparison of Microstructure and Mechanical Properties
Many emerging applications in microscale engineering rely on the fabrication of 3D
architectures in inorganic materials. Small‐scale additive manufacturing (AM) aspires to …
architectures in inorganic materials. Small‐scale additive manufacturing (AM) aspires to …
Structure-Directing Weak Interactions with 1,4-Diiodotetrafluorobenzene Convert One-Dimensional Arrays of [MII(acac)2] Species into Three-Dimensional Networks
The complexes [MII (acac) 2](M= Cu 1, Pd 2, Pt 3; Hacac= acetylacetone) and 1, 4-
diiodotetrafluorobenzene (FIB) were cocrystallized in CHCl3–MeOH solutions to form …
diiodotetrafluorobenzene (FIB) were cocrystallized in CHCl3–MeOH solutions to form …
Charged particle-induced surface reactions of organometallic complexes as a guide to precursor design for electron-and ion-induced deposition of nanostructures
JC Yu, MK Abdel-Rahman, DH Fairbrother… - … Applied Materials & …, 2021 - ACS Publications
Focused electron beam-induced deposition (FEBID) and focused ion beam-induced
deposition (FIBID) are direct-write fabrication techniques that use focused beams of charged …
deposition (FIBID) are direct-write fabrication techniques that use focused beams of charged …
Focused Electron Beam-Induced Deposition and Post-Growth Purification Using the Heteroleptic Ru Complex (η3-C3H5)Ru(CO)3Br
J Jurczyk, CR Brewer, OM Hawkins… - … applied materials & …, 2019 - ACS Publications
Focused electron beam-induced deposition using the heteroleptic complex (η3-C3H5) Ru
(CO) 3Br as a precursor resulted in deposition of material with Ru content of 23 at …
(CO) 3Br as a precursor resulted in deposition of material with Ru content of 23 at …
[HTML][HTML] Atomistic modeling of thermal effects in focused electron beam-induced deposition of MeAu(tfac)
The role of thermal effects in the focused electron beam-induced deposition (FEBID) of Me 2
Au (tfac) is studied by means of irradiation-driven molecular dynamics simulations. The …
Au (tfac) is studied by means of irradiation-driven molecular dynamics simulations. The …
In situ real-time annealing of ultrathin vertical Fe nanowires grown by focused electron beam induced deposition
Abstract Focused Electron Beam Induced Deposition is a consolidated technique for the
growth of three-dimensional (3D) nanostructures. However, this single-step nanofabrication …
growth of three-dimensional (3D) nanostructures. However, this single-step nanofabrication …
High-purity copper structures from a perfluorinated copper carboxylate using focused electron beam induced deposition and post-purification
L Berger, J Jurczyk, K Madajska… - ACS Applied …, 2020 - ACS Publications
The electron-induced modification of volatile physisorbed metal–organic molecules is the
key process in focused electron beam induced deposition (FEBID). In this work, the …
key process in focused electron beam induced deposition (FEBID). In this work, the …