Northrop Grumman LITEF GmbH (NG LITEF) started the development of MEMS gyroscope
chips with Deep Reactive Ion Etching (DRIE) in 2003. In parallel a 6 degree of freedom …

This article presents a microelectromechanical system (MEMS) Coriolis-based mass-flow-to-
digital converter (DC) that can be used with both liquids and gases. It consists of a …

This paper presents the implementation of a bandpass filter tuning circuit solely based on
noise observation for a continuous-time (CT) delta-sigma modulator gyroscope readout …

Electronic readout circuits for microelectromechanical gyroscopes suffer from high power
consumption caused by the electrostatic sensor actuation with signals above the standard …

This paper introduces a digital interface application-specific integrated circuit (ASIC) for a
micro-electromechanical systems (MEMS) vibratory gyroscope. The driving circuit of the …

The performance of microelectromechanical system (MEMS) gyroscopes can be significantly
enhanced by matching the resonance frequencies of the drive and sense mechanical …

This paper presents the linear parametric resonance for MEMS vibratory gyroscopes using
triangular area-varying capacitors. Compared to parametric resonance using gap-varying …

The central concept underpinning the operation of the micro-gyroscope is the detection of
the weak Coriolis force. We describe in detail the working principle of an optical micro …

High-precision microelectromechanical system (MEMS) gyroscopes are significant in many
applications. Bias instability (BI) is an important parameter that indicates the performance of …

This paper proposes an interface application-specific-integrated-circuit (ASIC) for micro-
electromechanical systems (MEMS) vibratory gyroscopes. A closed self-excited drive loop is …