Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …

We address a robotic flow shop scheduling problem where two part types are processed on
each given set of dedicated machines. A single robot moving on a fixed rail transports one …

This work studies the scheduling problem of a single-arm multicluster tool with a linear
topology and process-bound bottleneck individual tool. The objective is to find a one-wafer …

For path planning problems based on Rapidly exploring Random Trees (RRT), most new
nodes merely explore the environment unless they are sampled directly from the subset that …

In wafer fabrication, a robotic cluster tool is required to be closed down in order for
engineers to perform its on-demand and preventive maintenance and switch between …

Nowadays, wafer fabrication in semiconductor manufacturing is highly dependent on cluster
tools. A cluster tool is equipped with several process modules (PMs) and a wafer handling …

Production scheduling is a critical factor to enhancing productivity in manufacturing
engineering and combinatorial optimization research. The complexity and dynamic nature of …

Accompanying the unceasing progress of integrated circuit manufacturing technology, the
mainstream production mode of current semiconductor wafer fabrication is featured with …

Cell transmission model (CTM) is useful for evaluating the performance of urban traffic
networks due to its mathematical formalism. This paper explores the application of CTM to …

To satisfy the requirements of high-mix integrated-circuit chip production, multiple wafer
types are grouped into a lot to be fabricated concurrently in a multi-cluster tool system …