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This paper reports on the design, fabrication, and characterization of piezoelectrically-
transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk …

(52) US Cl................. 725/36; 725/34; 725/35; 725/51; sion service of available content.
Responsive to determining 725/112; 725/136 to inform the one or more users of the …

US9762202B2 - Method of manufacturing a mechanical resonating structure - Google Patents
US9762202B2 - Method of manufacturing a mechanical resonating structure - Google Patents …

S lication file f let h historv. ee appl1cauon Ille Ior complete searcn n1Story The defect
portion can affect periodicity characteristics of the (56) References Cited phononic crystal …

(57) ABSTRACT A piezoelectric micromachined ultrasonic transducer com prising a
substrate and a first dielectric film formed on the Substrate. An opening having a sidewall is …

(57) ABSTRACT A micro-electrical-mechanical system (MEMS) vibrating structure includes a
carrier Substrate, a first anchor, a second anchor, a single crystal piezoelectric body, and a …

(57) ABSTRACT A contour mode micromechanical piezoelectric resonator. The resonator
has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the …

Recent demand in wireless communication for miniatur ized, low-power, low-cost, on-chip
and high-Q resonators to be employed in front-end RF filters or as frequency references has …

Disclosed are methods for fabricating encapsulated microelectromechanical systems
(MEMS) devices. A MEMS device fabricated on a CMOS wafer is encapsulated using an …