Additive manufacturing of metal structures at the micrometer scale
Currently, the focus of additive manufacturing (AM) is shifting from simple prototyping to
actual production. One driving factor of this process is the ability of AM to build geometries …
actual production. One driving factor of this process is the ability of AM to build geometries …
Review of magnetic nanostructures grown by focused electron beam induced deposition (FEBID)
JM De Teresa, A Fernández-Pacheco… - Journal of Physics D …, 2016 - iopscience.iop.org
We review the current status of the use of focused electron beam induced deposition
(FEBID) for the growth of magnetic nanostructures. This technique relies on the local …
(FEBID) for the growth of magnetic nanostructures. This technique relies on the local …
[HTML][HTML] The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors
RM Thorman, RK TP, DH Fairbrother… - Beilstein journal of …, 2015 - beilstein-journals.org
Focused electron beam induced deposition (FEBID) is a single-step, direct-write
nanofabrication technique capable of writing three-dimensional metal-containing nanoscale …
nanofabrication technique capable of writing three-dimensional metal-containing nanoscale …
[HTML][HTML] Focused-electron-beam engineering of 3D magnetic nanowires
C Magén, J Pablo-Navarro, JM De Teresa - Nanomaterials, 2021 - mdpi.com
Focused-electron-beam-induced deposition (FEBID) is the ultimate additive nanofabrication
technique for the growth of 3D nanostructures. In the field of nanomagnetism and its …
technique for the growth of 3D nanostructures. In the field of nanomagnetism and its …
Absolute cross sections for dissociative electron attachment and dissociative ionization of cobalt tricarbonyl nitrosyl in the energy range from 0 eV to 140 eV
S Engmann, M Stano, P Papp, MJ Brunger… - The Journal of …, 2013 - pubs.aip.org
We report absolute dissociative electron attachment (DEA) and dissociative ionization (DI)
cross sections for electron scattering from the focused electron beam induced deposition …
cross sections for electron scattering from the focused electron beam induced deposition …
Direct-write atomic layer deposition of high-quality Pt nanostructures: selective growth conditions and seed layer requirements
AJM Mackus, NFW Thissen, JJL Mulders… - The Journal of …, 2013 - ACS Publications
Electron beam-induced deposition (EBID) enables the direct-write patterning of metallic
structures with sub-10 nm lateral resolution without the use of resist films or etching/lift-off …
structures with sub-10 nm lateral resolution without the use of resist films or etching/lift-off …
Understanding the electron-stimulated surface reactions of organometallic complexes to enable design of precursors for electron beam-induced deposition
JA Spencer, SG Rosenberg, M Barclay, YC Wu… - Applied Physics A, 2014 - Springer
Standard practice in electron beam-induced deposition (EBID) is to use precursors designed
for thermal processes, such as chemical vapor deposition (CVD). However, organometallic …
for thermal processes, such as chemical vapor deposition (CVD). However, organometallic …
[HTML][HTML] Pillar Growth by Focused Electron Beam-Induced Deposition Using a Bimetallic Precursor as Model System: High-Energy Fragmentation vs. Low-Energy …
R Winkler, M Brugger-Hatzl, F Porrati, D Kuhness… - Nanomaterials, 2023 - mdpi.com
Electron-induced fragmentation of the HFeCo3 (CO) 12 precursor allows direct-write
fabrication of 3D nanostructures with metallic contents of up to> 95 at%. While microstructure …
fabrication of 3D nanostructures with metallic contents of up to> 95 at%. While microstructure …
Focused Electron Beam-Induced Deposition and Post-Growth Purification Using the Heteroleptic Ru Complex (η3-C3H5)Ru(CO)3Br
J Jurczyk, CR Brewer, OM Hawkins… - … applied materials & …, 2019 - ACS Publications
Focused electron beam-induced deposition using the heteroleptic complex (η3-C3H5) Ru
(CO) 3Br as a precursor resulted in deposition of material with Ru content of 23 at …
(CO) 3Br as a precursor resulted in deposition of material with Ru content of 23 at …
Direct-write deposition and focused-electron-beam-induced purification of gold nanostructures
D Belic, MM Shawrav, M Gavagnin… - … applied materials & …, 2015 - ACS Publications
Three-dimensional gold (Au) nanostructures offer promise in nanoplasmonics, biomedical
applications, electrochemical sensing and as contacts for carbon-based electronics. Direct …
applications, electrochemical sensing and as contacts for carbon-based electronics. Direct …