Perspective: Ga2O3 for ultra-high power rectifiers and MOSFETS

SJ Pearton, F Ren, M Tadjer, J Kim - Journal of Applied Physics, 2018 - pubs.aip.org
Gallium oxide (Ga2O3) is emerging as a viable candidate for certain classes of power
electronics with capabilities beyond existing technologies due to its large bandgap …

3.8-MV/cm Breakdown Strength of MOVPE-Grown Sn-Doped -Ga2O3 MOSFETs

AJ Green, KD Chabak, ER Heller… - IEEE Electron …, 2016 - ieeexplore.ieee.org
A Sn-doped (100)-Ga 2 O 3 epitaxial layer was grown via metal–organic vapor phase
epitaxy onto a single-crystal, Mg-doped semi-insulating (100)-Ga 2 O 3 substrate. Ga 2 O 3 …

[HTML][HTML] Structural and electronic properties of Ga2O3-Al2O3 alloys

H Peelaers, JB Varley, JS Speck… - Applied Physics …, 2018 - pubs.aip.org
Ga 2 O 3 is emerging as an important electronic material. Alloying with Al 2 O 3 is a viable
method to achieve carrier confinement, to increase the bandgap, or to modify the lattice …

[HTML][HTML] Enhancement-mode Ga2O3 wrap-gate fin field-effect transistors on native (100) β-Ga2O3 substrate with high breakdown voltage

KD Chabak, N Moser, AJ Green, DE Walker… - Applied Physics …, 2016 - pubs.aip.org
Sn-doped gallium oxide (Ga 2 O 3) wrap-gate fin-array field-effect transistors (finFETs) were
formed by top-down BCl 3 plasma etching on a native semi-insulating Mg-doped (100) β-Ga …

Progress of Ultra-Wide Bandgap Ga2O3 Semiconductor Materials in Power MOSFETs

H Zhang, L Yuan, X Tang, J Hu, J Sun… - … on Power Electronics, 2019 - ieeexplore.ieee.org
As a promising ultra-wide bandgap semiconductor, the β-phase of Ga 2 O 3 has attracted
more and more interest in the field of power electronics due to its ultra-wide bandgap (4.8 …

Lateral β-Ga2O3 field effect transistors

KD Chabak, KD Leedy, AJ Green, S Mou… - Semiconductor …, 2019 - iopscience.iop.org
Abstract Beta phase Gallium Oxide (BGO) is an emerging ultra-wide bandgap
semiconductor with disruptive potential for ultra-low power loss, high-efficiency power …

Enhancement-mode Ga2O3 MOSFETs with Si-ion-implanted source and drain

MH Wong, Y Nakata, A Kuramata… - Applied Physics …, 2017 - iopscience.iop.org
Enhancement-mode β-Ga 2 O 3 metal–oxide–semiconductor field-effect transistors with low
series resistance were achieved by Si-ion implantation doping of the source/drain contacts …

Delta-doped β-gallium oxide field-effect transistor

S Krishnamoorthy, Z Xia, S Bajaj… - Applied Physics …, 2017 - iopscience.iop.org
We report silicon delta doping in gallium oxide (β-Ga 2 O 3) grown by plasma-assisted
molecular beam epitaxy using a shutter pulsing technique. We describe the growth …

Band offsets of (100) β-(AlxGa1− x) 2O3/β-Ga2O3 heterointerfaces grown via MOCVD

AFM Bhuiyan, Z Feng, JM Johnson, HL Huang… - Applied Physics …, 2020 - pubs.aip.org
The valence and conduction band offsets at (100) β-(Al x Ga 1− x) 2 O 3/β-Ga 2 O 3
heterointerfaces with the increasing Al composition are determined via x-ray photoelectron …

[HTML][HTML] Spectroscopic and electrical calculation of band alignment between atomic layer deposited SiO2 and β-Ga2O3 (2¯ 01)

Y Jia, K Zeng, JS Wallace, JA Gardella… - Applied Physics …, 2015 - pubs.aip.org
The energy band alignment between atomic layer deposited (ALD) SiO 2 and β-Ga 2 O 3 (⁠
2 01⁠) is calculated using x-ray photoelectron spectroscopy and electrical measurement of …