Time-resolved Langmuir probe diagnostics of a bipolar high power impulse magnetron sputtering discharge
R Hippler, M Cada, Z Hubicka - Applied Physics Letters, 2020 - pubs.aip.org
High power impulse magnetron sputtering (HiPIMS) of a cobalt cathode in argon gas was
investigated by time-resolved electrical (Langmuir) probe diagnostics and by time-integrated …
investigated by time-resolved electrical (Langmuir) probe diagnostics and by time-integrated …
Time-resolved optical emission spectroscopy of a unipolar and a bipolar pulsed magnetron sputtering discharge in an argon/oxygen gas mixture with a cobalt target
Reactive high power impulse magnetron sputtering (HiPIMS) of a cobalt cathode in pure
argon gas and with different oxygen admixtures was investigated by time-resolved optical …
argon gas and with different oxygen admixtures was investigated by time-resolved optical …
Optical spectroscopy for sputtering process characterization
N Britun, J Hnilica - Journal of Applied Physics, 2020 - pubs.aip.org
In this Tutorial, various methods of optical spectroscopy representing certain interest for
magnetron discharge characterization are overviewed. The main principles, the …
magnetron discharge characterization are overviewed. The main principles, the …
Time-resolved diagnostics of a bipolar HiPIMS discharge
R Hippler, M Cada, Z Hubicka - Journal of Applied Physics, 2020 - pubs.aip.org
Bipolar high power impulse magnetron sputtering (HiPIMS) with a yttrium target is
investigated with the help of time-resolved diagnostics. The bipolar HiPIMS discharge is …
investigated with the help of time-resolved diagnostics. The bipolar HiPIMS discharge is …
Deposition of cobalt oxide films by reactive pulsed magnetron sputtering
R Hippler, M Cada, P Ksirova, J Olejnicek… - Surface and Coatings …, 2021 - Elsevier
Cobalt oxide films were deposited with the help of reactive high power impulse magnetron
sputtering (HiPIMS) and mid-frequency pulsed magnetron sputtering (PMS) in argon gas at …
sputtering (HiPIMS) and mid-frequency pulsed magnetron sputtering (PMS) in argon gas at …
Revisiting particle dynamics in HiPIMS discharges. I. General effects
A detailed experimental study of high power impulse magnetron sputtering processes is
performed by time-resolved imaging of the ground state sputtered particles. New details …
performed by time-resolved imaging of the ground state sputtered particles. New details …
[HTML][HTML] Pressure dependence of singly and doubly charged ion formation in a HiPIMS discharge
Generation of singly charged Ar+ and Ti+, doubly charged Ar 2+ and Ti 2+, and of Ar 2+
and Ti 2+ dimer ions in a high power impulse magnetron sputtering (HiPIMS) discharge with …
and Ti 2+ dimer ions in a high power impulse magnetron sputtering (HiPIMS) discharge with …
Microstructure of titanium coatings controlled by pulse sequence in multipulse HiPIMS
The deposition rate, as well as the structure of a coating for a given magnetron sputtered
material are determined by the plasma properties which are significantly dependent on the …
material are determined by the plasma properties which are significantly dependent on the …
Pulse length dependence of a reactive high power impulse magnetron (HiPIMS) discharge
R Hippler, M Cada, A Mutzke… - Plasma Sources Science …, 2023 - iopscience.iop.org
The pulse length dependence of a reactive high power impulse magnetron sputtering
(HiPIMS) discharge with a tungsten cathode in an argon+ oxygen gas mixture gas was …
(HiPIMS) discharge with a tungsten cathode in an argon+ oxygen gas mixture gas was …
Mass spectrometry analyzes to highlight differences between short and long HiPIMS discharges
A Ferrec, J Kéraudy, PY Jouan - Applied Surface Science, 2016 - Elsevier
This study investigates the understanding of the impact on the pulse width duration (30 and
100 μs) regarding the plasma dynamic of an HiPIMS discharge by investigating time …
100 μs) regarding the plasma dynamic of an HiPIMS discharge by investigating time …